A bissilylamino group-containing organic polysilazane compound having an average composition represented by general formula (1) below: ##STR00001##
wherein R.sup.1 is a monovalent hydrocarbon group, R.sup.2 is a divalent hydrocarbon group, R.sup.3 and R.sup.4 are a monovalent hydrocarbon group, R.sup.3 and R.sup.4 optionally bond each other to form a ring structure together with a silicon atom to which R.sup.3 and R.sup.4 are bonded and a nitrogen atom to which the silicon atom is directly bonded, R.sup.5 is a monovalent hydrocarbon group, p is 0 or 1, q is 0, 1, or 2, and a and b are numbers which satisfy 0<a≤1, 0≤b<1, and a+b=1, and having a number average molecular weight in terms of polystyrene measured by GPC of 500 to 100,000.

Provided is a barrier film, comprising: a base layer; and an inorganic layer including Si, N, and O, wherein the inorganic layer has a thickness of 600 nm or less, and the film has a water vapor transmission rate of 0.5×10.sup.−3 g/m.sup.2.Math.day as measured under conditions of a temperature of 38° C. and 100% relative humidity. The barrier film has excellent barrier properties and optical properties and can be used for electronic products sensitive to moisture.

Embodiments of the present disclosure provide a method of manufacturing a metal column using 3D printing technology. The method of manufacturing a metal column includes steps of: creasing a 3D-CAD design for printing the metal column; printing the metal column; pretreating the inner surface of a channel inside the metal column at low temperature; and coating the inner surface of the channel with a stationary phase so that the metal column is capable of separating a gas mixture into components.

To provide a siliceous film manufacturing composition that can fill a narrow and a high aspect ratio trench and can produce a thick siliceous film. [Means for Solution] The present invention provides a siliceous film manufacturing composition that comprises, (a) a block copolymer having a linear and/or cyclic polysilane backbone block with or more silicon atoms and a polycarbosilane backbone block with or more silicon atoms, and (b) a solvent.

The composition of the present invention is a mixed composition including at least one metal compound (G) selected from a metal compound represented by the following formula (G1) and a condensate thereof, a polysilazane (F), and a solvent (I), in which an amount of the polysilazane (F) is 0.01% by mass or more and less than 50% by mass.

M(R.sup.g10).sub.r(A.sup.g1).sub.m-r  (G1)

In formula (G1), M represents Al, Fe, In, Ge, Hf, Si, Ti, Sn, Zr, or Ta, R.sup.g10 represents a hydrocarbon chain-containing group or a hydrogen atom, r is 0 or 1, a plurality of A.sup.g1 each independently represent a hydrolyzable group, and m is an integer of 3 to 5 in accordance with the metal atom M.

The composition of the present invention is a mixed composition including at least one metal compound (G) selected from a metal compound represented by the following formula (G1) and a condensate thereof, a polysilazane (F), and a solvent (I), in which an amount of the polysilazane (F) is 0.01% by mass or more and less than 50% by mass.

M(R.sup.g10).sub.r(A.sup.g1).sub.m-r  (G1)

In formula (G1), M represents Al, Fe, In, Ge, Hf, Si, Ti, Sn, Zr, or Ta, R.sup.g10 represents a hydrocarbon chain-containing group or a hydrogen atom, r is 0 or 1, a plurality of A.sup.g1 each independently represent a hydrolyzable group, and m is an integer of 3 to 5 in accordance with the metal atom M.

The composition of the present invention is a mixed composition including at least one metal compound (G) selected from a metal compound represented by the following formula (G1) and a condensate thereof, a polysilazane (F), and a solvent (I), in which an amount of the polysilazane (F) is 0.01% by mass or more and less than 50% by mass.

M(R.sup.g10).sub.r(A.sup.g1).sub.m-r  (G1)

In formula (G1), M represents Al, Fe, In, Ge, Hf, Si, Ti, Sn, Zr, or Ta, R.sup.g10 represents a hydrocarbon chain-containing group or a hydrogen atom, r is 0 or 1, a plurality of A.sup.g1 each independently represent a hydrolyzable group, and m is an integer of 3 to 5 in accordance with the metal atom M.

The composition of the present invention is a mixed composition including at least one metal compound (G) selected from a metal compound represented by the following formula (G1) and a condensate thereof, a polysilazane (F), and a compound (H) including a siloxane chain. M(R.sup.g10).sub.r(A.sup.g1).sub.m-r (G1) wherein M represents Al, Fe, In, Ge, Hf, Si, Ti, Sn, Zr, or Ta, R.sup.g10 represents a hydrocarbon chain-containing group or a hydrogen atom, r is 0 or 1, a plurality of A.sup.g1 each independently represent a hydrolyzable group, and m is an integer of 3 to 5 in accordance with the metal atom M.

The composition of the present invention is a mixed composition including at least one metal compound (G) selected from a metal compound represented by the following formula (G1) and a condensate thereof, a polysilazane (F), and a compound (H) including a siloxane chain. M(R.sup.g10).sub.r(A.sup.g1).sub.m-r (G1) wherein M represents Al, Fe, In, Ge, Hf, Si, Ti, Sn, Zr, or Ta, R.sup.g10 represents a hydrocarbon chain-containing group or a hydrogen atom, r is 0 or 1, a plurality of A.sup.g1 each independently represent a hydrolyzable group, and m is an integer of 3 to 5 in accordance with the metal atom M.

A mixed composition including an organosilicon compound (A) in which at least one trialkylsilyl group-containing molecular chain and at least one hydrolyzable group are bonded to a silicon atom, a metal compound (B), an acid (C), and water (D), in which a ratio [D/(A+B)] of a molar amount of the water (D) to a total molar amount of the organosilicon compound (A) and the metal compound (B) is 3.1 to 130.