C23C4/12

Rotating blade having a rib arrangement with a coating
09797264 · 2017-10-24 · ·

The present invention relates to a rotating blade (5), in particular for a compressor or turbine stage of a gas turbine, having a radially outer rib arrangement with at least one rib (2), onto which a coating (3) is disposed, whereby, in a meridian section, the coating (3) has an outer contour (3.1), which extends axially outwardly in the radial direction.

Rotating blade having a rib arrangement with a coating
09797264 · 2017-10-24 · ·

The present invention relates to a rotating blade (5), in particular for a compressor or turbine stage of a gas turbine, having a radially outer rib arrangement with at least one rib (2), onto which a coating (3) is disposed, whereby, in a meridian section, the coating (3) has an outer contour (3.1), which extends axially outwardly in the radial direction.

Electrostatic chuck and method of manufacturing electrostatic chuck

An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

Electrostatic chuck and method of manufacturing electrostatic chuck

An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

Method of forming a piezoelectric actuator

A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Method of forming a piezoelectric actuator

A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Emissivity controlled coatings for semiconductor chamber components
09790581 · 2017-10-17 · ·

A component for a semiconductor processing chamber, the component including a substrate and a coating layer provided on a surface of the substrate, wherein the coating layer includes at least a first coating layer having a thermal emissivity of more than 0.98 to 1, having plasma resistance, and having a color value L in a range of 35 to 40 through a thickness direction thereof.

Article and method of making thereof

An article including a substrate and a plurality of coatings disposed on the substrate is presented. The plurality of coatings includes a thermal barrier coating disposed on the substrate; and a protective coating including a calcium-magnesium-aluminum-silicon-oxide (CMAS)-reactive material disposed on the thermal barrier coating. The CMAS-reactive material has an orthorhombic weberite crystal structure. The CMAS-reactive material is present in the plurality of coatings in an effective amount to react with a CMAS composition at an operating temperature of the thermal barrier coating, thereby forming a reaction product having one or both of melting temperature and viscosity greater than that of the CMAS composition. A method of making the article and a related turbine engine component are also presented.

THERMAL SPRAY SLURRY, THERMAL SPRAY COATING AND METHOD FOR FORMING THERMAL SPRAY COATING

This invention provides a thermal spray slurry capable of forming a favorable thermal spray coating. The thermal spray slurry comprises a dispersion medium and thermal spray particles formed of at least one material selected from the group consisting of a ceramic, a cermet and a metal. 800 mL of the thermal spray slurry contains A kg of the thermal spray particles; when 800 mL of the thermal spray slurry in which the thermal spray particles are dispersed is supplied at a flow rate of 35 mL/min to a horizontally-placed tube and collected, the collected slurry contains B kg of the thermal spray particles; and the slurry has a supply efficiency index If of 70% or higher, determined by the next equation If (%)=B/A×100.

THERMAL SPRAY SLURRY, THERMAL SPRAY COATING AND METHOD FOR FORMING THERMAL SPRAY COATING

This invention provides a thermal spray slurry capable of forming a favorable thermal spray coating. The thermal spray slurry comprises a dispersion medium and thermal spray particles formed of at least one material selected from the group consisting of a ceramic, a cermet and a metal. 800 mL of the thermal spray slurry contains A kg of the thermal spray particles; when 800 mL of the thermal spray slurry in which the thermal spray particles are dispersed is supplied at a flow rate of 35 mL/min to a horizontally-placed tube and collected, the collected slurry contains B kg of the thermal spray particles; and the slurry has a supply efficiency index If of 70% or higher, determined by the next equation If (%)=B/A×100.