C23C14/04

Method and chamber for backside physical vapor deposition

A method of depositing a backside film layer on a backside of a substrate includes loading a substrate having one or more films deposited on a front side of the substrate onto a substrate support of a processing chamber, depositing, from the sputter target, a target material on the backside of the substrate to form a backside layer on the backside of the substrate, and applying an RF bias to an electrode disposed within the substrate support while depositing the target material. The front side of the substrate faces the substrate support and is spaced from a top surface of the substrate support, and a backside of the substrate faces a sputter target of the processing chamber.

THERMAL COATING OF POWER ELECTRONICS BOARDS FOR THERMAL MANAGEMENT

An apparatus includes a printed circuit board (PCB), a power component disposed on the PCB, the power component to generate heat, and a multilayered coating disposed over the power component and at least a portion of the PCB to dissipate heat from the power component, the multilayered including: an electrical insulation layer comprising a non-polar compound and disposed on the power component and the at least a portion of the PCB; a chromium layer disposed on the electrical insulation layer; and a copper layer disposed on the chromium layer that is at least 10 microns (μm) thick, the copper layer conformally adhered to a top of the power component and to the PCB.

ELECTROCHROMIC DEVICE AND MANUFACTURING METHOD
20230034675 · 2023-02-02 ·

The electrochromic device includes a first transparent substrate, a first transparent conductive layer, an ion storage layer, an ion transfer layer, an electrochromic layer, a second transparent conductive layer, and a second transparent substrate which are sequentially stacked, where the first transparent conductive layer includes at least two first conductive portions, the second transparent conductive layer includes at least two second conductive portions, and an extension direction of the at least two first conductive portions and an extension direction of the at least two second conductive portions are configured to intersect with each other.

MASK PLATE ASSEMBLY
20230036857 · 2023-02-02 ·

A mask plate assembly is provided, including a first mask plate and multiple types of first mask strips having different effective evaporation patterns, where the first mask plate includes a first frame and a first support strip arranged between a set of opposite sides of the first frame, a first hollowed-out portion including multiple first holes is arranged in a first region of the first support strip, and the multiple first holes are used for cooperating with the multiple types of first mask strips for evaporation to form different first functional structures.

MASK PLATE ASSEMBLY
20230036857 · 2023-02-02 ·

A mask plate assembly is provided, including a first mask plate and multiple types of first mask strips having different effective evaporation patterns, where the first mask plate includes a first frame and a first support strip arranged between a set of opposite sides of the first frame, a first hollowed-out portion including multiple first holes is arranged in a first region of the first support strip, and the multiple first holes are used for cooperating with the multiple types of first mask strips for evaporation to form different first functional structures.

MASK, MASK ASSEMBLY, AND METHOD FOR MANUFACTURING MASK ASSEMBLY
20230031990 · 2023-02-02 · ·

Provided are a mask, a mask assembly, and a method for manufacturing a mask assembly, the mask including: an effective mask region located in a middle portion of the mask, wherein the effective mask region includes a plurality of first through holes arranged in an array; and a welding region configured to be welded to a mask frame and located on opposite sides of the effective mask region, wherein the welding region includes a plurality of second through holes arranged in an array.

METAL TONE DECORATIVE SHEET AND METAL TONE DECORATIVE MOLDED BODY PROVIDED WITH METAL TONE DECORATIVE SHEET

A metal tone decorative sheet has an excellent metallic luster and electromagnetic wave transmissivity, and a metal tone decorative molded body is provided with the metal tone decorative sheet. A metal tone decorative sheet includes a metal layer on a base material layer, wherein the metal layer includes a plurality of island portions containing metal and a sea portion positioned between the island portions, the island portion is a convex quadrangle in a cross-sectional view, one side of the quadrangle being opposed to the base material layer, and 0≤x-y≤80 where a length of a side of the island portion on the base material layer side is x [nm] and a length of a side of the island portion on an opposite side to the base material layer is y [nm].

Systems and methods for optimal source material deposition along hole edges

A method for depositing a coating of a source material onto a panel is disclosed. The method includes providing a cathodic arc, the cathodic arc including a target surface, the target surface disposed along a target deposition axis and able to emit the source material as a generally cloud of source material vapor and a generally conical stream of liquid particles of the source material. The method further includes positioning the panel relative to the target surface based on a deposition angle, the deposition angle being between the target surface and an outer limit of the generally conical stream of liquid particles o the source material. The method may further include emitting the source material from the target surface as the generally conical cloud of source material vapor and coating the edge with the cloud of source material vapor to provide an edge coating.

Tension mask frame assembly manufacturing apparatus and method
11616199 · 2023-03-28 · ·

An apparatus for manufacturing a tension mask-frame assembly includes a frame loading unit configured to load a tension mask-frame assembly, a pressing unit configured to press the support frame, a load cell configured to measure a force applied to the support frame, and a control unit configured to control the pressing unit to pre-deform the support frame in accordance with at least a portion of a bending deformation amount of the support frame, caused by own weight of the support frame and tension of the tension mask. The pressing unit includes inward pressing members which press the pair of support frames toward the inside of the frame, and outward pressing members which press the support frame toward the outside of the frame. The outward pressing members are disposed in a slot formed in a lengthwise direction of the support frame.

METAL MASK
20230037092 · 2023-02-02 ·

A method of manufacturing a metal mask includes calendering a metal material, so as to form a metal mask substrate, where the metal mask substrate includes a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction. The surface has at least one sampling region, while at least two grooves are distributed in the sampling region, where an average area ratio of the area of the grooves within the sampling region to the area of the sampling region ranges between 45% and 68%.