There are provided a porous membrane including a perfluoroalkoxy alkane (PFA)-based melt-extruded film and having pores controlled by biaxial stretching, and a manufacturing method therefore. The porous membrane is for water treatment and includes a fluoropolymer. The method includes forming a film by melt-extruding a fluoropolymer; and controlling the pore size of the formed film by biaxial stretching. The membrane for water treatment is based on a fluoropolymer and has physical properties that are resistant to high temperatures and strong acids, and it is able to be used for treatment of wastewater such as semiconductor wastewater.

Methods of treating CMP wastewater comprising azoles are disclosed. The method includes providing the wastewater having a first azole concentration, introducing the wastewater to an inlet of a wastewater treatment system constructed and arranged to produce and introduce free radicals into the wastewater, and activating the wastewater treatment system to produce and introduce the free radicals into the wastewater in an amount sufficient to reduce the azole concentration in the wastewater and produce treated water having a second azole concentration, less than the first azole concentration. Methods of facilitating treatment of CMP wastewater comprising azoles by providing a water treatment system constructed and arranged to produce and introduce free radicals into the wastewater are disclosed.

A wash water processing apparatus of reusing wash water includes: a washing processing part washing a subject to be washed; a wash water accommodation part into which processed water used in a washing process in the washing processing part is once accommodated; a sterilization and purification unit causing, while acting with an ozone supply function, ozone water to be contained in the processed water flowing through the wash water accommodation part in a circular manner; and a filtration mechanism part configured to include a filter and an ion-exchange resin and sequentially filtrating the processed water to be reused as wash water in the washing processing part, as the ozone water is supplied as the processed water is mixed to dilute an ozone concentration in the wash water accommodation part. In a state where the ozone concentration is adjusted, the processed water is passed through the filter and the ion-exchange resin.

A wash water processing apparatus (12), a sterilization and water-purification apparatus, and a cleaning method include a control apparatus (16) formed of a storage part (16b) having stored therein an arithmetic expression capable of finding a discharge amount of processed water and a supply amount of pure water in accordance with an ozone concentration and a TOC concentration of processed water and a control part (16a) which controls the ozone supply part and TOC adjustment device (22). Supply of pure water to processed water of processed water, or discharge of processed water and supply of pure water is performed by the TOC concentration adjustment device in accordance with a result found from the arithmetic expression to reduce the TOC concentration of wash water for use in a washing processing part (11) to a value equal to or smaller than a predetermined value.

A waste liquid treating apparatus for purifying a waste liquid discharged from a processing apparatus includes a waste liquid accommodating tank for the waste liquid discharged by the processing apparatus, a spray water seal type pump that sucks a spray together with air in a processing region where a processing unit is disposed, a sealing water reservoir tank that recovers the spray and reserves the spray as a waste liquid, and a waste liquid filter unit that filters that waste liquid and the waste liquid in the waste liquid accommodating tank, to purify the waste liquid into fresh water. A fresh water reservoir tank reserves the fresh water obtained by filtering the waste liquid, and a pure water producing unit purifies the fresh water reserved in the fresh water reservoir tank into pure water. A temperature control unit controls the temperature of the pure water.

Per- and polyfluoroalkyl substances (PFAS) are destroyed by oxidation in supercritical conditions. PFAS in water is concentrated in a reverse osmosis step and salt from the resulting solution is removed in supercritical conditions prior to destruction of PFAS in supercritical conditions.

The invention relates to a method for treating fluoride-containing, in particular HF containing wastewater to remove fluoride and to a corresponding apparatus. In the new method calcium carbonate is reacted in a reaction step at an acidic pH≤4 with the fluoride in the wastewater to form calcium fluoride particles. Then, in a subsequent filtration step said calcium fluoride particles are separated by a porous membrane from the treated wastewater. The inventive apparatus comprises at least one reaction container/tank for reacting calcium carbonate at an acidic pH≤4 with fluoride in the wastewater to form calcium fluoride particles, as well as at least one porous membrane, in particular at least one porous ceramic membrane for separating calcium fluoride particles from the treated wastewater in a filtration step.

A wash water processing method and a wash water processing apparatus in a simple structure capable of effectively decomposing organic matters and killing bacteria contained in wash water, extending the life of a filter of a filtration apparatus and an ion-exchange resin and, furthermore, extending a bacteria-killing/washing interval of a washing processing part. In the wash water processing apparatus (11) and the washing method, a wash water accommodation part (12) into which processed water processed in a washing processing part (10) flows and a filtration mechanism part (14) are connected and the wash water accommodation part has connected in a circulatable manner thereto an inflow flow path and an outflow flow path of a sterilization and purification unit which organically couples respective functions of an ozone supply part which supplies ozone, an ultraviolet irradiation part which irradiates with ultraviolet rays, and a photocatalysis part which causes a photocatalyst to act.

A system and method for evaporative treatment or wastewater which minimizes scaling and system maintenance is disclosed. The apparatus can include an evaporation vessel with a heating source to evaporate water from a solution under treatment and a drain valve for draining the solution after treatment. The apparatus can also include one or more sensors configured to measure parameters of a solution under treatment and a user programmable controller to control the treatment process based on such measurements. A user can configure the controller to define the detection of a solution's critical state where contaminant concentrations are maximized yet scaling is minimized. When a critical state of the solution is reached a portion of the treated solution can be removed and the vessel refill with new wastewater thereby lowering the concentration of the remaining solution the repealing the evaporation and drain cycle until all wastewater has been treated.

A conductive aqueous solution production device 1 has an ion exchange device 2 mounted on the way of the main pipe 11 supplying ultrapure water W as raw water, a supply pipe 12 which joins the main pipe 11 on the downstream side of the ion exchange device 2, and a conductivity-imparting substance supply device 3. For example, if the conductivity-imparting substance is ammonia, since the ions are cations, that is, ammonium ions (NH.sub.4.sup.+), it is preferable that an ion exchanger which fills the ion exchange device 2 be a cation exchange resin. If the conductivity-imparting substance is carbon dioxide, the ions are anions, that is, bicarbonate ions (HCO.sub.3.sup.−) or carbonate ions (CO.sub.3.sup.2−), and therefore it is preferable that the ion exchange device 2 be filled with an anion exchange resin. Such a conductive aqueous solution production device is capable of producing a conductive aqueous solution with a stable concentration, and achieves excellent follow-up performance with respect to a change in concentration.