Per- and polyfluoroalkyl substances (PFAS) are destroyed by oxidation in supercritical conditions. PFAS in water is concentrated in a reverse osmosis step and salt from the resulting solution is removed in supercritical conditions prior to destruction of PFAS in supercritical conditions.

A method, system and composition is described for treating waste generated from manufacturing operations including at least one of Printed Circuit Boards Fabrication (PCB FAB), General Metal Finishing (GMF), semiconductors manufacturing, chemical milling, and Physical Vapour Deposition (PVD). The method, system and composition are used to create zero liquid discharge recycling.

Provided is a method for producing ultrapure water to supply, to a use point, ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus, wherein the raw material water for ultrapure water production contains at least one or more elements selected from B, As, Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb, and wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and water to be treated is passed through the ion exchanger-filled module for treatment.

A cleaning water supply device includes an ultrapure water line through which ultrapure water flows by a fixed amount, a production unit that produces cleaning water by adding a solute to the ultrapure water line by a fixed amount, a storage tank for the cleaning water, cleaning machines to which the cleaning water is supplied from the storage tank, and a controller that controls the cleaning water production unit so that a water level in the storage tank is in a predetermined range.

A waste liquid treating device includes a holding section that holds an adhesion plate, a vertically moving mechanism that moves the holding section vertically, and a peeling mechanism that peels off water-containing swarf from the adhesion plate held by the holding section. The peeling mechanism includes two air nozzles extending in parallel to each other in a horizontal direction with a spacing therebetween and including jet ports formed to face each other, a valve disposed in a piping providing communication between the two air nozzles and an air source, and a control unit that performs control of opening and closing of the valve and control of the vertically moving mechanism for moving the adhesion plate in the vertical direction in the spacing between the two air nozzles.

Sorbent compositions that includes a base sorbent material having a high porosity and surface area and a boron-selective agent are particularly useful for the sequestration of boron from waste materials such as coal combustion residual leachate (CCRs). By using a boron-selective agent in conjunction with a high surface area base sorbent material such as activated carbon or biochar, a sorbent composition with a high capacity for sequestering boron at relatively low cost is provided.

A waste fluid treatment apparatus removing processing debris from a processing waste fluid discharged from a processing apparatus. The waste fluid treatment apparatus includes a fluid bath storing the processing waste fluid, an inflow port through which the processing waste fluid is introduced to the fluid bath, a collecting area having an inclined surface for depositing the processing debris at a predetermined portion of a bottom of the fluid bath in a concentrated manner, a vacuum pump discharging the processing debris deposited in the collecting area to an outside of the fluid bath, and an outflow port through which a processing waste fluid obtained by removing the processing debris is discharged.

A method of removing fluoride ion from waste liquid is provided, which includes providing a calcium source and a plurality of ceramic particles to a waste liquid containing fluoride ion for forming a plurality of calcium fluoride layers wrapping the ceramic particles. The calcium fluoride layers are connected to form a calcium fluoride bulk. The ceramic particles are embedded in the calcium fluoride bulk. The ceramic particles and the calcium fluoride bulk have a weight ratio of 1:4 to 1:20.

A water treatment system is provided with a nitrogen-containing organic compound oxidizing device that treats the first-stage treatment water after filtration and removal of cation ions. An oxidant-containing water stream and an inorganic bromide-containing water stream are respectively added into a pipeline that conducts the first-stage treatment water and then pass through an in-pipe mixer and a mixing unit, whereby to oxidize the nitrogen-containing organic compounds in the first-stage treatment water and then form the second-stage treatment water for output.

Described are filter materials having polycarboxyl ligands, such as iminodiacetic acid, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter various fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.