A component for use in a semiconductor processing chamber is provided. A component body of a dielectric material has a semiconductor processing facing surface. A coating of a dielectric material is on at least the semiconductor processing facing surface, wherein the dielectric material of the component body has a same stoichiometry as the dielectric material of the coating.

A light-emitting ceramic that includes a pyrochlore type compound that contains 0.01 mol % or more of Bi with respect to 100 mol % of the general formula M1.sub.XM2.sub.YM3.sub.ZO.sub.W, wherein M1 is at least one of La, Y, Gd, Yb, and Lu, M2 is at least one of Zr, Sn, and Hf, M3 is at least one of Ta, Nb, and Sb, X, Y, Z, and W are positive numbers that maintain electrical neutrality, X+Y+Z=2.0, 0.005≤Z≤0.2, and 3X+4Y+5Z is 7.02 or less.

A Faraday rotator and an optical isolator having a high transmittance and a high Verdet constant are provided. The optical isolator includes at least a Faraday rotator that rotates a polarization plane of incident light in a non-reciprocal manner, a polarizer disposed on a light incident side of the Faraday rotator, and an analyzer disposed on a light exit side of the Faraday rotator. The Faraday rotator is made of an oxide containing ytterbium oxide (Yb.sub.2O.sub.3), and is manufactured by a ceramic manufacturing process, wherein the oxide is allowed to contain an oxide of a metal other than ytterbium, and the proportion of ytterbium in all metal atoms in the oxide is 80% or more.

A Faraday rotator and an optical isolator having a high transmittance and a high Verdet constant are provided. The optical isolator includes at least a Faraday rotator that rotates a polarization plane of incident light in a non-reciprocal manner, a polarizer disposed on a light incident side of the Faraday rotator, and an analyzer disposed on a light exit side of the Faraday rotator. The Faraday rotator is made of an oxide containing ytterbium oxide (Yb.sub.2O.sub.3), and is manufactured by a ceramic manufacturing process, wherein the oxide is allowed to contain an oxide of a metal other than ytterbium, and the proportion of ytterbium in all metal atoms in the oxide is 80% or more.

A gas nozzle having a fired surface excellent in particle reduction effect is provided. The gas nozzle 1 is a columnar gas nozzle made of sintered ceramics, provided with at least one through-hole 2 through which gas flows. The entire inner surface 2a of the through-hole 2 and the end face 1A on which outlet 2b of the through-hole 2 is provided are both fired surfaces. The inner surface 2a of the through-hole 2 has a first region A in the vicinity of the outlet 2b and a second region B which is located at a further position than the first region A. The average crystal grain size in the first region A is formed to be smaller than the average crystal grain size in the second region B.

A paramagnetic garnet-type transparent ceramic is a sintered body of complex oxide represented by the following formula (1), comprising SiO.sub.2 as a sintering aid in an amount of more than 0% by weight to 0.1% by weight or less, and has a linear transmittance of 83.5% or more at the wavelength of 1,064 nm for an optical path length of 25 mm:
(Tb.sub.1-x-yY.sub.xSc.sub.y).sub.3(Al.sub.1-zSc.sub.z).sub.5O.sub.12  (1)
wherein 0.05≤x<0.45, 0<y<0.1, 0.5<1−x−y<0.95, and 0.004<z<0.2.

The present disclosure provides a method of making a ceramic article. The method includes (a) obtaining a photopolymerizable slurry or sol including a plurality of ceramic particles distributed in the photopolymerizable slurry or sol and (b) selectively polymerizing the photopolymerizable slurry or sol using actinic radiation and continuous movement of a build substrate through the photopolymerizable slurry or sol to form a gelled article. The method also includes (c) extracting solvent from the gelled article to form an aerogel article or a xerogel article; (d) heat treating the aerogel article or the xerogel article to form a porous ceramic article; and (e) sintering the porous ceramic article to form a sintered ceramic article. The sintered ceramic article exhibits a particular density. Further, additive manufactured ceramic articles are provided that exhibit a particular density, opacity, or both. Preferably, all cross-sectional portions of an interior of the ceramic article having selected dimensions are free of a frequency analysis signal maxima larger than a background signal.

A rim-rotor assembly has an annular structure including a composite rim and a hub. Blades project from the hub, tips of the blades contacting the annular structure, the blades configured to be loaded in compression against the annular structure. A thermal barrier is in the annular structure, the thermal barrier defining at least part of a radially inward surface of the annular structure. The tips of the blades contact the thermal barrier, the thermal barrier being a thermal barrier coating.

The present invention relates to a protective layer against CMAS, to a CMAS-resistant article comprising the protective layer according to the invention, and to a process for preparing a corresponding article.

The present invention relates to a protective layer against CMAS, to a CMAS-resistant article comprising the protective layer according to the invention, and to a process for preparing a corresponding article.