This invention serves to repurpose existing ethylene oxide sterilization chambers utilizing a novel chemical means of sterilization. Ethylene oxide is a longstanding gaseous sterilant for medical devices but has increasing problems associated with its hazards. Ethylene oxide is a carcinogenic and explosive chemical, and its emissions can be very harmful and cause serious health risks. Due to this, the FDA and many medical device manufacturers are trying to reduce or eliminate the use of the gas. Chlorine dioxide gas is a nearly identical alternative mode of sterilization that is non-carcinogenic and non-explosive. If firms choose to eliminate the use of ethylene oxide but do not want to waste the capital expenditure on existing sterilizers, they can instead utilize the ethylene oxide-to-chlorine dioxide conversion system of the present invention and use an effective and environmentally friendly form of sterilization in a system they already possess.

A desulfurization wastewater zero discharge treatment method and system suitable for multiple working conditions. A tail flue of a boiler and a bottom outlet of a wastewater drying tower are both communicated with an inlet of a dust collector; an outlet of the dust collector is communicated with flue gas inlets of a wastewater concentration tower and a desulfurization absorption tower; the wastewater concentration tower is communicated with the desulfurization absorption tower; the desulfurization absorption tower is communicated with a chimney; the desulfurization absorption tower is communicated with a gypsum cyclone; the gypsum cyclone is communicated with a filtrate water tank; the gypsum cyclone is communicated with a gypsum dewatering machine; the gypsum dewatering machine is communicated with a gas liquid separating tank; and a flue gas port of the tail flue of the boiler is communicated with the flue gas inlet of the wastewater drying tower.

A process for recovery of lithium ions from a lithium-bearing brine includes contacting the lithium-bearing brine with a lithium ion sieve (where that LIS includes an oxide of titanium or niobium) in a first stirred reactor to form a lithium ion complex with the lithium ion sieve, and decomplexing the lithium ion from the lithium ion sieve in a second stirred reactor to form the lithium ion sieve and an acidic lithium salt eluate.

There is provided an exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas. The exhaust gas processing apparatus comprises a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which the processing gas is flowed out from; a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein; and one or multiple spray nozzles placed in the liquid tank. The outlet of the suction casing is arranged to be located above a liquid surface of the liquid stored in the liquid tank. The one or multiple spray nozzles are configured to spray the liquid from around the outlet of the suction casing to a peripheral part of the outlet.

Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a chamber including a top substrate holder and a bottom substrate holder. In some embodiments, an exhaust port is located at a midpoint between the top substrate holder and the bottom substrate holder. Methods and systems in accordance with these and other embodiments are also disclosed.

An object of the present invention is to provide a new frameless catalytic thermal oxidation device capable of treating concentrations of harmful materials including NOx at a low temperature. Further, another object of the present invention is to provide a frameless catalytic thermal oxidation device capable of minimizing the occurrence of THC and minimizing a risk of accidents and environmental pollution which may occur in maintenance operations. According to the objects, the present invention provides a cartridge-type thermal oxidation device capable of being separated for maintenance, wherein a cartridge internal structure is configured so that the time while the material to be treated stays in a zone with the catalyst is increased, and a member capable of dropping and collecting powder generated by thermal oxidation reaction is configured.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Processes and facilities for producing recycled chemical products from waste plastic are described herein. The processes include treating process streams, such as a pyrolysis gas stream and/or at least a portion of a cracker furnace effluent stream, in a caustic scrubber process to remove certain components, such as carbon dioxide. The spent caustic solution from the caustic scrubber process is then recycled and reused in other caustic processes within the facility, which can include a halogen neutralization process from removing halogens from a liquification process off-gas.

Described are composite adsorption media that contain two or more different types of adsorbent material in binder, that may preferably be prepared by additive manufacturing techniques, as well as methods of preparing the structures by additive manufacturing methods.

An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction, and a collector configured to collect the powder.