A cleaning method for sectional cleaning of a filter having several filter sections, the filter sections being cleaned within a cleaning cycle in cleaning processes separated in time from one another, the cleaning method having at least two cleaning cycles and both a time interval between the cleaning processes within the respective cleaning cycle and also a time interval between the end of one of the cleaning cycles and the start of a following one of the cleaning cycles being changed. Moreover, a connecting device for connecting a filter to a cleaning device having a side wall, which borders an internal cross section, which increases along a longitudinal axis of the connecting device and has lateral openings with assigned major axes and a method of connecting the connecting device to a filter device.

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. In an effort to improve packaging density, fluid delivery modules preferably incorporate both active and passive components into a single substrate block. This enables increases in packaging density as well as enabling reduced cost through greater simplification of the fluid delivery module. For instance, incorporating a filter to filter incoming fluid with a valve or other component in a single monolithic block avoids the need for separate components which add cost and complexity.

Embodiments herein relate to filtration systems that can pulse clean filter elements selectively, in specific patterns, to enhance cleaning efficacy. In an embodiment, a filtration system is included having a plurality of filter element mounts configured to retain filter elements, a compressed gas supply, and a plurality of valves in fluid communication with the compressed gas supply. The system further including a control circuit configured to control actuation of the plurality of valves. The system can operate in a first mode and a second mode. Wherein operating in a first mode includes opening valves according to a first valve actuation pattern and operating in a second mode includes opening valves according to a second valve actuation pattern. The system can be configured to periodically switch from the first mode to the second mode and compare the efficacy of the two modes. Other embodiments are also included herein.

A clothes treatment apparatus includes: a cabinet forming a treatment space for storing clothes; a filter module having a filter portion for filtering out dust from air passing therethrough; an air flow path having a plurality of preset flow paths for directing air to be discharged into the treatment space; a fan for moving the air in the air flow path; at least one valve disposed on the air flow path; a valve actuating module for actuating the valve; and a control part for controlling the valve actuating module so as to select one of the plurality of flow paths. The plurality of flow paths include: at least one bypass flow path for directing the air to bypass the filter portion; and at least one filtering flow path for directing the air to pass through the filter portion.

A power tool having a power tool housing, a motor, a tool moved relative to the housing by the motor, a fan rotated by the motor such that a fluid flow with debris generated by tool is moved into the fluid inlet by the fan and through the discharge outlet, and a filter that is removably attached to the power tool housing. The power tool housing includes a fluid inlet and a discharge outlet. The filter includes a filter media for separating the debris from the flow of fluid. The filter media defines a collection container for storing the debris. The filter also includes an opening through which the flow of fluid with the debris enters the collection container, and a valve that is moveable between a closed position, in which the opening is closed, and an open position, in which the opening is open. The valve includes a duckbill check valve.

A low-profile, large diameter, oval shaped, modular, inside out flow in-tank filter assembly includes at least one filter element having spaced first and second identical endcaps each with a central opening there through and filter media extending between the endcaps. The filter assembly includes a tank bushing coupled to the central opening of one endcap of at least one filter element on one end of the assembly, wherein the tank bushing is configured to mount the inside out flow in-tank filter assembly to a return line within a reservoir. The filter assembly includes a bypass valve coupled to the central opening of one endcap of at least one filter element on one end of the assembly, wherein the bypass valve is configured to allow flow to selectively bypass the filter media of each filter element. Further, each endcap includes a universal alignment and coupling structure around the central opening.

The present disclosure relates to a dust extractor (1) comprising a dust cyclone container (3) comprising a dust inlet (2) leading into the dust cyclone container (3), the dust extractor (1) further comprising a fine filter section (12) adapted to receive at least one fine filter part (15) downstream the dust cyclone container (3). A contaminated side of the fine filter part (15) is adapted to be fluidly connected to the dust cyclone container (3) via an air channel (47) that at least partly is comprised in a lid arrangement (13,14) and runs between a cyclone channel connecting rim (23) and a first fine filter section channel connecting rim (40), when the lid arrangement (13, 14) is positioned over the dust cyclone container (3) and the fine filter section (12). A first lid part (13) is releasably attachable to the dust cyclone container (3) and a second lid part (14) is releasably attachable to the fine filter section (12).

A negative pressure-side flow path having a negative pressure-side filter and a positive pressure-side flow path having a positive pressure-side filter are connected in parallel between a first port and a second port, and a shuttle valve is installed between the negative pressure-side flow path and the positive pressure-side flow path, and the first port, thus when a negative pressure is supplied to the first port, the first port is caused to communicate with the second port through the negative pressure-side flow path, and when a positive pressure is supplied to the first port, the first port is caused to communicate with the second port through the positive pressure-side flow path.

A docking station for a dust collection box comprising: a housing; a socket formed by the housing configured to receive a dust collection box of a dust extractor; first and second apertures formed through a wall of the housing which aligns with air outlet and inlet apertures of a dust collection box when the dust collection box is mounted within the socket; a connector connectable to a vacuum source; and a dust channel mounted inside of the housing, which provides a passageway between the second aperture and the connector. The docking station may further include an air vent formed through a wall of the housing to allow air surrounding the housing to enter a cavity formed inside of the housing, where the first aperture is connected to the cavity in the housing to allow air in the cavity to exit the housing through the first aperture.

The invention discloses a reticle storage device including a top lid, a bottom lid and a soft contact member. The top lid has a ceiling and a cover surrounding the ceiling. The bottom lid has a carrier and a peripheral structure surrounding the carrier. The soft contact member is configured to laterally extend in between the cover and the peripheral structure when the top lid and the bottom lid engage with each other, and to extend from an inside to an outside of the device in order to buffer the contact among the two lids.