A spray lubrication system of sheets is provided with electronically adjustable frequency spraying valves housed at upper and lower spraying heads. Sheets travel between heads on three motorized rolls. The sheet is clamped between rolls and contrast wheels. Sensors monitor and adjust lubricant temperature. A first group of motion sensors detect whether the sheet passes at each spraying valve or not. Using the first sensor group, the system can self-learn the shape of the sheet. A second group of motion sensors at both spraying heads detects whether a lubricant spraying is present at each valve. Using the second sensors, the system can diagnose a malfunction whenever a discrepancy is found between the spraying frequency controlled to a valve and whether a spraying is present at each valve. The upper spraying head is in a box for aspirating the oil mists generated by the lubrication system during the work cycle.

An apparatus and a method for continuously manufacturing moisture films are revealed. At least one loading surface formed by a belt conveyor is used to support and move a lower fabric layer synchronously. During the movement, a top surface of the lower fabric layer is coated with a first fixing solution layer, a gel layer and a second fixing solution layer so as to form a film gradually. Moreover, an upper fabric layer is provided to be attached over the gel layer correspondingly. Then the second fixing solution layer is coated over the upper fabric layer. Thereby a continuous manufacturing of moisture films with or without carriers is completed.

A film forming apparatus, a substrate processing apparatus, and a device manufacturing method are provided, which improve the film thickness uniformity of a thin film that is formed on a substrate by spraying a thin film material. The film forming apparatus which forms a thin film on a substrate is provided with a nozzle that sprays a thin film material and an exhaust unit that discharges a gas. An exhaust port of the exhaust unit is arranged on a side that is opposite to the direction in which the gravity acts with respect to the substrate. The substrate processing apparatus performs a predetermined process on the substrate using the film forming apparatus. The device manufacturing method manufactures a device using the film forming apparatus.

A film forming apparatus, a substrate processing apparatus, and a device manufacturing method are provided, which improve the film thickness uniformity of a thin film that is formed on a substrate by spraying a thin film material. The film forming apparatus which forms a thin film on a substrate is provided with a nozzle that sprays a thin film material and an exhaust unit that discharges a gas. An exhaust port of the exhaust unit is arranged on a side that is opposite to the direction in which the gravity acts with respect to the substrate. The substrate processing apparatus performs a predetermined process on the substrate using the film forming apparatus. The device manufacturing method manufactures a device using the film forming apparatus.

An apparatus and a method for continuously manufacturing moisture films are revealed. At least one loading surface formed by a belt conveyor is used to support and move a lower fabric layer synchronously. During the movement, a top surface of the lower fabric layer is coated with a first fixing solution layer, a gel layer and a second fixing solution layer so as to form a film gradually. Moreover, an upper fabric layer is provided to be attached over the gel layer correspondingly. Then the second fixing solution layer is coated over the upper fabric layer. Thereby a continuous manufacturing of moisture films with or without carriers is completed.

A film forming apparatus, a substrate processing apparatus, and a device manufacturing method are provided, which improve the film thickness uniformity of a thin film that is formed on a substrate by spraying a thin film material. The film forming apparatus which forms a thin film on a substrate is provided with a nozzle that sprays a thin film material and an exhaust unit that discharges a gas. An exhaust port of the exhaust unit is arranged on a side that is opposite to the direction in which the gravity acts with respect to the substrate. The substrate processing apparatus performs a predetermined process on the substrate using the film forming apparatus. The device manufacturing method manufactures a device using the film forming apparatus.

Disclosed are a robot configured to walk by using a linear actuator, and a method of controlling the same. An embodiment may provide a walking robot, in which two or more robot legs are connected in a row, the walking robot including a leg including one or more linear actuators, and a controller configured to control the linear actuators, in which the leg includes a plurality of supports disposed in a longitudinal direction of the leg, two or more connection shafts configured to connect the plurality of supports, and the linear actuators connected to at least two connection shafts among the two or more connection shafts.