B06B1/0692

Piezoelectric micromachined ultrasound transducer device with multi-layer etched isolation trench
11577276 · 2023-02-14 · ·

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a layer of piezoelectric material that is activated and sensed by an electrode and a conductive plane layer. The conductive plane layer may be electrically connected to processing circuitry by a via that extends through the piezoelectric layer. One or more isolation trenches extend through the conductive plane layer to isolate the conductive plane layer from other conductive plane layers of adjacent PMUT devices of a PMUT array.

Ultrasonic sensing module, ultrasonic sensing device and control method thereof, display device

An ultrasonic sensing module, an ultrasonic sensing device and a control method thereof, and a display device. The ultrasonic sensing module includes a first electrode layer, a piezoelectric layer, a receiving electrode layer and an emission electrode layer. The first electrode layer is on a first side of the piezoelectric layer; the receiving electrode layer and the emission electrode layer insulated from the receiving electrode layer are on a second side of the piezoelectric layer; and the second side is opposite to the first side.

FINGERPRINT IDENTIFICATION STRUCTURE, DRIVING METHOD THEREOF AND ELECTRONIC DEVICE

Disclosed are a fingerprint identification structure, a driving method thereof and an electronic device. The fingerprint identification structure includes: a driving electrode layer; a piezoelectric material layer; a receiving electrode layer, which includes M receiving electrodes; an auxiliary driving electrode layer, which is located at the side of the piezoelectric material layer away from the receiving electrode layer, and is arranged in a layer different from the driving electrode layer; and a first insulating layer, the auxiliary driving electrode layer includes N auxiliary driving electrodes; the N driving electrodes and the N auxiliary driving electrodes are alternately arranged; and the orthographic projection, on the piezoelectric material layer, of an i-th auxiliary driving electrode overlaps with an interval between the orthographic projections, on the piezoelectric material layer, of an i-th driving electrode and an (i+1)-th driving electrode.

Configurable ultrasonic imager

An imaging device includes a two dimensional array of piezoelectric elements. Each piezoelectric element includes: a piezoelectric layer; a bottom electrode disposed on a bottom side of the piezoelectric layer and configured to receive a transmit signal during a transmit mode and develop an electrical charge during a receive mode; and a first top electrode disposed on a top side of the piezoelectric layer; and a first conductor, wherein the first top electrodes of a portion of the piezoelectric elements in a first column of the two dimensional array are electrically coupled to the first conductor.

ULTRASONIC RADIATOR AND ULTRASONIC DEVICE
20230023517 · 2023-01-26 ·

An ultrasonic radiator includes a plurality of plate-like elements, a supporter, and a first adhesive. The plurality of plate-like elements each have, on the front side or the back side, a radiation surface from which ultrasonic waves are emitted. The supporter holds the plurality of plate-like elements in such a manner that the respective radiation surfaces in different directional orientations are directed toward the same location. The plurality of plate-like elements are bonded to the supporter with the first adhesive. The plurality of plate-like elements each include a plurality of vibratory elements that are variously located in the radiation surface and that generate ultrasonic waves. The first adhesive is applied to lateral surfaces of each of the plurality of plate-like elements.

Piezoelectric poling of a wafer with temporary and permanent electrodes
11563166 · 2023-01-24 · ·

An array of piezoelectric micromachined ultrasound transducers (PMUTs) has a layer of piezoelectric material that requires poling during fabrication in order to properly align the piezoelectric dipoles to create a desired ultrasonic signal. The PMUT may have an interconnected set of lower electrodes that are fabricated between a processing layer of the PMUT and the piezoelectric layer. An upper electrode is fabricated overlaying the piezoelectric layer, and a poling voltage is applied between the upper electrode and the interconnected set of lower electrodes. After poling is complete, portions of the interconnected set of lower electrodes are removed to permanently isolate permanent lower electrodes from each other.

APPARATUS
20230211376 · 2023-07-06 · ·

An apparatus may include a vibration member and a vibration apparatus provided at a rear surface of the vibration member to vibrate the vibration member. The vibration apparatus may include at least one or more first vibration portions and a plurality of second vibration portions different from the at least one or more first vibration portions. The at least one or more first vibration portions may be at a periphery of, or may be adjacent to, the plurality of second vibration portions.

ULTRASONIC FINGERPRINT SENSOR APPARATUS, METHOD OF OPERATING ULTRASONIC FINGERPRINT SENSOR APPARATUS, AND METHOD OF FABRICATING ULTRASONIC FINGERPRINT SENSOR APPARATUS

An ultrasonic fingerprint sensor apparatus is provided. The ultrasonic fingerprint sensor apparatus includes an array of a plurality of ultrasonic sensors on a base substrate. A respective one of the plurality of ultrasonic sensors includes a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode. The ultrasonic fingerprint sensor apparatus further includes a plurality of bias lines respectively electrically connected to a plurality of columns of ultrasonic sensors in the array of the plurality of ultrasonic sensors. The ultrasonic fingerprint sensor apparatus further includes a polarization electrode; a first lead line electrically connected to the polarization electrode; and a second lead line electrically connected to the plurality of bias lines. The first lead line and the second lead line are in a peripheral region of the ultrasonic fingerprint sensor apparatus.

ACOUSTIC TRANSDUCER AND METHOD OF MANUFACTURING

An acoustic transducer array and method of making same. A first metal layer is deposited on a first side of a piezoelectric composite to form a common electrode and a second metal layer is provided over the obverse side. Portions of the second metal layer are removed to create a plurality of individual electrodes. A third metal layer may be deposited onto the plurality of individual electrodes, the third metal layer being thicker than the second metal layer. The individual electrodes extend beyond the piezoelectric composite in the elevation direction to create electrode leads. Metal layers may be provided by lithography, a wireframe or a foil sheet.

Sound transducer and method for operating the sound transducer

A sound transducer and a method for operating a sound transducer are disclosed. In an embodiment a sound transducer includes a first piezoelectric element having first external electrodes configured to generate an acoustic signal from an electrical signal or vice versa, and at least one second external electrode, wherein the second external electrode is separately controllable from the first external electrodes in order to set electro-acoustic properties of the sound transducer.