The present invention provides techniques to more accurately control the process performance of treatments in which microelectronic substrates are treated by pressurized fluids that are sprayed onto the substrates in a vacuum process chamber control strategies are used that adjust mass flow rate responsive to pressure readings in order to hold the pressure of a pressurized feed constant. In these embodiments, the mass flow rate will tend to vary in order to maintain pressure uniformity.

In a substrate processing apparatus, a cup part is moved in an up-down direction to cause a cup exhaust port to selectively overlap a first chamber exhaust port or a second chamber exhaust port. In the state in which the cup exhaust port overlaps the first chamber exhaust port, gas in the cup part is discharged through the cup exhaust port and the first chamber exhaust port by a first exhaust mechanism. In the state in which the cup exhaust port overlaps the second chamber exhaust port, the gas in the cup part is discharged through the cup exhaust port and the second chamber exhaust port by a second exhaust mechanism. In this way, an exhaust mechanism for exhausting gas from the cup part can be easily switched between the first exhaust mechanism and the second exhaust mechanism.

The invention proposes a system and a method for the selective extraction of viscous hydrocarbons from tanks and other containers. The system comprises the following components for heating the hydrocarbons: a steam ejector -3-, in which there takes place an eddy diffusion of its drive steam with the gases it aspirates by means of the Venturi effect, and a perimetric heating conduit -5- externally attached to the tank or container. The method comprises the following operations: heating a surface layer of hydrocarbons by means of the gases injected by the steam ejector, causing a selective flow of hot hydrocarbons to the perimetric conduit; localized heating of the hydrocarbons with the perimetric conduit, causing the precipitation of water and a selective flow of the hottest hydrocarbons to an extraction pump; and extracting the precipitated water and the hydrocarbons flowing selectively from the perimetric conduit by means of two pumps.

Spray apparatus and uses thereof are described herein. A vacuum spray nozzle apparatus may include a first tube in fluid communication with a fluid source, a rotor coupled to the tube, a conduit in fluid communication with the passages of the first tube, and a second tube coupled to the conduit, the second tube being in fluid communication with a vacuum source. The rotor is in fluid communication with the pressurized fluid source. The conduit is substantially arched or angled such that an outlet of the conduit is offset a radial distance in a radial direction from the rotor axis, and when pressurized fluid is ejected from the outlet, during use, rotates the conduit. The vacuum spray nozzle apparatus is configured to remove components from a material through the second tube when a pressure of the system is reduced using the vacuum source.

A handpiece of a skin care device is disclosed. The handpiece includes a body part having an attaching and detaching hole provided on one side thereof, a solution introducing part linked with the attaching and detaching hole, an air discharging part, and a disposable tip module mounted onto the attaching and detaching hole of the body part. The tip module includes a cylinder body detachably mounted onto the attaching and detaching hole, and an inner cylinder configured to have a hollow inside and installed in the cylinder body. The hollow inside of the inner cylinder is linked with the solution introducing part and is configured as a solution injection flow channel in which a solution introduced from the solution introducing part flows when the tip module is mounted onto the attaching and detaching hole.

The invention relates to a device for cleaning the surface of a tool for shaping the surface of a large-area fiber composite material body using a highly pressurized cleaning liquid, having a nozzle support which is held on a central bearing in a rotatable manner, at least one jet nozzle which is held in an arm of the nozzle support and out of which the highly pressurized cleaning liquid exits during operation, and a control unit for controlling the cleaning liquid pressure to be applied, wherein the nozzle support is surrounded by a housing which is provided with an opening towards the tool surface to be cleaned. The housing is connected to a suction device by means of which a housing interior equipped with the nozzle support can be suctioned. The housing interior is connected to an outer surrounding area via a pressure valve, and a liquid-tight seal with a flexible shape is arranged on a housing end which forms the opening, wherein the seal can be used to seal the space between the nozzle support and the body surface to be cleaned from the outer surrounding area, and the control unit has at least two pressure range settings. The invention additionally relates to a method for cleaning a surface of a tool.

A cleaning vehicle generally has a grey water reservoir having a pre-filter; an aspiration conduit leading into the grey water reservoir upstream from the pre-filter and a vacuum pump adapted to create a vacuum inside the grey water reservoir to draw grey water; a vortex separation subsystem connected downstream from the pre-filter; a filtration bag subsystem connected downstream from the vortex separation subsystem; a filtrate reservoir connected downstream from the filtration bag subsystem; a high pressure hose having an end connected downstream from the filtrate reservoir and another end having a high pressure spray nozzle; a filtrate path extending from the grey water reservoir to the high pressure spray nozzle via the pre-filter, the vortex separation subsystem, the filtration bag subsystem and the high pressure hose; and at least one pump adapted to entrain a flow of fluid along the filtrate path.

A system and method of clearing radioactive contamination from a surface is provided by means of a handheld device and a method of using the handheld device. The handheld device has a manual system which operates by pressing a button to spray radioactive wash on the surface. The handheld device also has an electrical system which operates by pressing a button to suction radioactive contamination from the surface. The function of this system is to clean the surface from radioactive contamination. The system of the handheld device consists of a suctioning part and a pump and functions by suctioning the radioactive contamination into a lead cylinder, from which it is easily disposed. A third component includes a gauge for detecting contamination before, during, and after the cleaning and suctioning processes of the handheld device.

A cleaning device for removing contamination on a substrate holder used with an electroplating cell includes an arm, a cleaning agent supplier, a nozzle and a receiver. The cleaning agent supplier is coupled to the arm and configured to supply a cleaning agent. The nozzle is coupled to the cleaning agent supplier and configured to spray the cleaning agent onto the substrate holder to remove the contamination. The receiver is coupled to the arm and configured to receive the cleaning agent after the cleaning agent is sprayed onto the substrate holder.

A system for and method of removing residues, deposits, and debris from a substrate that has been marked by a chemical etching process is disclosed. The system includes one or more upper sprayers that deposit a cleaning solution to a top surface of the product as it passes beneath the one or more upper sprayers. The system further includes at least one upper brush that operates to scrub the top surface of the product after the cleaning solution has been applied thereto. The system optionally includes one or more lower sprayers and lower brushes to clean a bottom surface of the product as it is conveyed through the system. The system further includes an air knife system that assists with drying the product prior to exiting the system. The system further includes a controller that is operable to adjust various system parameters.