A supplementary mechanism that provides a temperature rise and fall effect to a machine tool spindle is mainly used to connect to pipelines between a machine tool spindle and a cooling device. The present invention provides an additional heating function to the spindle of the machine tool that originally has a cooling device, and still retains its original cooling function. The supplementary mechanism can provide the effect of raising and lowering the temperature. When cooling, the liquid provided by the cooling device is passed to directly cool the machine tool spindle. When raising the temperature, the flow path is switched, so that the liquid of the cooling device cannot flow to the machine tool spindle, and the liquid flowing out of the machine tool spindle forms an independent circulation channel, and the supplementary mechanism heats the liquid in the independent circulation channel, achieving the effect of rapid heating.

An electrostatic chuck apparatus is provided that is capable of effectively reducing temperature imbalance of a wafer substrate that is heated to a high temperature. The electrostatic chuck apparatus includes a base including a cooling flow path through which a refrigerant may flow, an adiabatic layer on the base, a uniform heating plate on the adiabatic layer, a heating element between the adiabatic layer and the uniform heating plate, an insulating layer on the uniform heating plate and including a ceramic, a conductive layer on the insulating layer and having an area smaller than an area of the insulating layer, and a dielectric layer on the conductive layer and including a ceramic.

A machine tool comprises a structure in which at least one component (12) of this structure is thermally insulated from the external environment and in which this component (12) is sealed so as to prevent fluid communication between the inside (18) and the outside of the component (12) of the structure.

A core support system includes a support structure. The support structure includes a frame and a support member having a saturatable engagement layer disposed over the frame. A method of machining a core material incudes applying a fluid to an engagement layer of a support structure and saturating the engagement layer with the fluid, disposing a core material on the engagement layer, causing the fluid to freeze to secure to the core material to the support structure, machining the core material, melting the frozen fluid to release the core material from the support structure, and removing the core material from the engagement layer.

A core support system includes a support structure. The support structure includes a frame and a support member having a saturatable engagement layer disposed over the frame. A method of machining a core material includes applying a fluid to an engagement layer of a support structure and saturating the engagement layer with the fluid, disposing a core material on the engagement layer, causing the fluid to freeze to secure to the core material to the support structure, machining the core material, melting the frozen fluid to release the core material from the support structure, and removing the core material from the engagement layer.

A supplementary mechanism that provides a temperature rise and fall effect to a machine tool spindle is mainly used to connect to pipelines between a machine tool spindle and a cooling device. The present invention provides an additional heating function to the spindle of the machine tool that originally has a cooling device, and still retains its original cooling function. The supplementary mechanism can provide the effect of raising and lowering the temperature. When cooling, the liquid provided by the cooling device is passed to directly cool the machine tool spindle. When raising the temperature, the flow path is switched, so that the liquid of the cooling device cannot flow to the machine tool spindle, and the liquid flowing out of the machine tool spindle forms an independent circulation channel, and the supplementary mechanism heats the liquid in the independent circulation channel, achieving the effect of rapid heating.

A machine tool comprises a structure in which at least one component (12) of this structure is thermally insulated from the external environment and in which this component (12) is sealed so as to prevent fluid communication between the inside (18) and the outside of the component (12) of the structure.

A core support system includes a support structure. The support structure includes a frame and a support member having a saturatable engagement layer disposed over the frame. A method of machining a core material includes applying a fluid to an engagement layer of a support structure and saturating the engagement layer with the fluid, disposing a core material on the engagement layer, causing the fluid to freeze to secure to the core material to the support structure, machining the core material, melting the frozen fluid to release the core material from the support structure, and removing the core material from the engagement layer.

A core support system includes a support structure. The support structure includes a frame and a support member having a saturatable engagement layer disposed over the frame. A method of machining a core material incudes applying a fluid to an engagement layer of a support structure and saturating the engagement layer with the fluid, disposing a core material on the engagement layer, causing the fluid to freeze to secure to the core material to the support structure, machining the core material, melting the frozen fluid to release the core material from the support structure, and removing the core material from the engagement layer.

A fluid temperature control assembly in combination with a machine tool, and a method of adjusting the temperature of a fluid being supplied to a machine tool. The assembly is arranged to adjust the temperature of a fluid being supplied to the machine tool to maintain the fluid at a setpoint temperature at a location downstream of the assembly. The assembly comprises a radio frequency (RF) or microwave energy source to supply energy to the fluid as it passes through the assembly to heat the fluid, a temperature sensing arrangement for outputting a temperature signal responsive to the temperature of the fluid at the downstream location, and a control arrangement configured to receive the temperature signal and control the energy source with reference to the temperature signal to heat the fluid so as to maintain the fluid at the setpoint temperature at the downstream location.