A machine tool (1) includes a spindle (32) supported on a support surface (37a) of a support body (37) with such an orientation that the longitudinal axis of the spindle extends along the support surface (37a). The spindle (32) is movable in a vertical direction that is perpendicular to the longitudinal axis of the spindle (32). The support body (37) is provided with a ventilation hole (80) extending through the support body (37) between the support surface (37a) and a surface (37b) facing in the direction opposite to the support surface (37a), to open toward the spindle (32).

A cooling system for cooling a machine tool having a machine temperature. The cooling system comprises gas source, refrigeration circulation, fan, and controller. The gas source is configured for providing gas. The refrigeration circulation comprises heat exchanger, compressor, condenser, and expansion valve. The heat exchanger is in fluid communication with the gas source and configured to cool the gas down to target temperature and to provide the gas to the machine tool. The compressor has operation frequency. The fan is configured to cool the condenser and has a rotation speed. The controller is connected to the compressor and the fan. When a target temperature difference that is equal to the machine temperature minus the target temperature is smaller than threshold temperature difference, the controller keeps the operation frequency at minimum frequency and sets the rotation speed to be smaller than a maximum rotation speed.

Provided is a machine tool (1) which is capable of measuring machining accuracy of a workpiece (W) with high accuracy and enables the time required from machining to measurement of machining accuracy to be greatly reduced. The machine tool (1) machining a workpiece (W) while moving a tool and the workpiece (W) relative to each other includes a cover (2) separating from outside a machining area for machining the workpiece (W) therein, and temperature adjusting means (30) used in machining of the workpiece (W) to adjust an ambient temperature of the machining area.

A cooling system for cooling a machine tool having a machine temperature. The cooling system comprises gas source, refrigeration circulation, fan, and controller. The gas source is configured for providing gas. The refrigeration circulation comprises heat exchanger, compressor, condenser, and expansion valve. The heat exchanger is in fluid communication with the gas source and configured to cool the gas down to target temperature and to provide the gas to the machine tool. The compressor has operation frequency. The fan is configured to cool the condenser and has a rotation speed. The controller is connected to the compressor and the fan. When a target temperature difference that is equal to the machine temperature minus the target temperature is smaller than threshold temperature difference, the controller keeps the operation frequency at minimum frequency and sets the rotation speed to be smaller than a maximum rotation speed.

Provided are a silicon ingot slicing apparatus capable of slicing silicon ingots in various forms such as blocks or wafers using microbubbles and wire electric discharge machining.

A spindle device includes a spindle shaft, a spindle housing, and a chuck portion as a rotating member. The chuck portion has, formed therein, a suctioning passage through which air suctioned from the outside flows. The spindle shaft has a first guide passage which guides air flowing through the suctioning passage to a clearance between the inner wall of the spindle housing defining a through hole in which the spindle shaft is inserted and the outer wall of the spindle shaft facing the inner wall, by way of the interior of the spindle shaft. The spindle housing has, formed therein, a second guide passage configured to guide the air guided to the clearance, to the outside.

A fluid supply apparatus according to an embodiment of the invention includes a housing and an internal structure which is housed in the hosing. The internal structure includes a shaft portion and a plurality of protrusions protruding from the outer circumferential surface of the shaft portion. A plurality of flow paths are formed between the plurality of protrusions, and a groove having a predetermined depth from the outer circumferential surface of the shaft portion is formed in each of at least a part of the plurality of flow paths.

A machine tool (1) includes a spindle (32) supported on a support surface (37a) of a support body (37) with such an orientation that the longitudinal axis of the spindle extends along the support surface (37a). The spindle (32) is movable in a vertical direction that is perpendicular to the longitudinal axis of the spindle (32). The support body (37) is provided with a ventilation hole (80) extending through the support body (37) between the support surface (37a) and a surface (37b) facing in the direction opposite to the support surface (37a), to open toward the spindle (32).

A spindle device includes a spindle housing, a spindle shaft rotatably supported inside the spindle housing, a spindle mount having an insertion cavity into which the spindle housing is inserted along the axial direction of the spindle shaft, and a mount cover covering the spindle mount. A temperature regulator for adjusting the temperature inside the mount cover is provided inside the mount cover.

Provided is a machine tool (1) which is capable of measuring machining accuracy of a workpiece (W) with high accuracy and enables the time required from machining to measurement of machining accuracy to be greatly reduced. The machine tool (1) machining a workpiece (W) while moving a tool and the workpiece (W) relative to each other includes a cover (2) separating from outside a machining area for machining the workpiece (W) therein, and temperature adjusting means (30) used in machining of the workpiece (W) to adjust an ambient temperature of the machining area.