Embodiments of the present disclosure generally relate to an apparatus for improving the film thickness on a substrate when using a heated substrate support. A cover plate to be placed over the top surface of a heated substrate support is disclosed. The cover plate includes a pocket formed in the middle thereof for the placement of a substrate. The cover plate may include a variety of features including a plurality of dimples, a plurality of radially disposed grooves, a plurality of annular grooves, lift pin holes, pin slots, and gas exhaust holes.

A disclosed substrate support includes a base and first and second supports. A refrigerant flow path is formed inside the base. The base has first to third regions. The first region has a circular upper surface. The second region surrounds the first region. The third region surrounds the second region. The upper surface of the first region, the upper surface of the second region, and the upper surface of the third region are flat and continuous. The first support is provided on the first region and is configured to support the substrate placed thereon. The second support is provided on the third region to surround the first support, is configured to support the edge ring placed thereon, and is separated from the first support.

A disclosed substrate support includes a base and first and second supports. A refrigerant flow path is formed inside the base. The base has first to third regions. The first region has a circular upper surface. The second region surrounds the first region. The third region surrounds the second region. The upper surface of the first region, the upper surface of the second region, and the upper surface of the third region are flat and continuous. The first support is provided on the first region and is configured to support the substrate placed thereon. The second support is provided on the third region to surround the first support, is configured to support the edge ring placed thereon, and is separated from the first support.

An apparatus for driving interchangeable flexible shafts. The apparatus having a stand; a platform coupled to the stand, the platform being configured to rotate around an axis of rotation; a disconnect affixed to the platform, the disconnect being configured to connect a rotary power source to a flexible shaft; and fasteners affixed to the platform, the fasteners being configured to releasably couple a reel for the flexible shaft to the platform.

A workholding apparatus for components having complex geometries or surfaces, which components are difficult constrain for the purpose of inspection, addresses the problem of adequately constraining such components in a convenient and cost-effective manner so that they do not move during inspection, while also making all or most critical features accessible to the inspection instruments being used. A method teaches how to eliminate setup changes between different components through the use of inexpensive modular attachments. These attachments are in the form of a single piece thermoplastic part which is affixed to each component having also reference features that can be interlocked into a common base fixture for more efficient inspection operations.

A workholding apparatus for components having complex geometries or surfaces, which components are difficult constrain for the purpose of inspection, addresses the problem of adequately constraining such components in a convenient and cost-effective manner so that they do not move during inspection, while also making all or most critical features accessible to the inspection instruments being used. A method teaches how to eliminate setup changes between different components through the use of inexpensive modular attachments. These attachments are in the form of a single piece thermoplastic part which is affixed to each component having also reference features that can be interlocked into a common base fixture for more efficient inspection operations.

A portable press is usable with parts that are assembled by interference fit or friction fit. A force application member slidably engages a plurality of guides. An actuator, such as a pneumatic or hydraulic jack or cylinder, applies force to the force application member to move the force application member toward a static plate. The force application member acts to either press in, or press out, a first part relative to a second part. The press of the invention is portable, so that the press can be moved to the mechanical structure requiring a press for removal or insertion of parts. The press may be constructed in a vertical or horizontal embodiment.

This application relates to a method of manufacturing an electrostatic chuck having good characteristics in heat dissipation, thermal shock resistance, and lightness. In one aspect, the method includes preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder. The method may also include preparing an electrode layer by sintering the composite powder through spark plasma sintering (SPS), and forming a dielectric layer on the electrode layer.

An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.

An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.