According to one embodiment of the present disclosure, there is provided a transfer apparatus comprising at least one arm configured to support a substrate; at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm; and a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.

Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a transfer apparatus having a central hub including a shaft extending at a distal end through the transfer region housing into the transfer region. The transfer apparatus may include a lateral translation apparatus coupled with an exterior surface of the transfer region housing, and configured to provide at least one direction of lateral movement of the shaft. The systems may also include an end effector coupled with the shaft within the transfer region. The end effector may include a plurality of arms having a number of arms equal to a number of substrate supports of the plurality of substrate supports in the transfer region.

A multiaxial robot of multitasking includes a base, a plurality of arms, at least one wrist, a first engaging structure, and a second engaging structure. The arms are sequentially connected from the base, and any adjacent two of the base and the arms are configured to rotate relative to each other. The wrist is connected to the farthest arm arranged relative to the base and configured to rotate relative to the connected arm. The first engaging structure is disposed on the wrist and configured to connect a first tool. The second engaging structure is disposed on one of the arms and configured to connect a second tool.

A coating system includes coating robots configured to coat a vehicle, and an operation robot. The operation robot includes a first arm configured to turn around a first axis; a second arm configured to turn around a second axis parallel to the first axis; a third arm configured to turn around a third axis parallel to the first axis; a fourth arm configured to turn around a fourth axis perpendicular to the first axis; a fifth arm configured to turn around a fifth axis parallel to the fourth axis; and a tip jig is supported at the fifth arm and is configured to turn around a sixth axis. The sixth axis is selectively parallel to the fifth axis or perpendicular to a plane which includes the fourth axis and the fifth axis.

A method includes accessing RGB and depth image data representing a scene that includes at least a portion of a robotic limb. Using this data, a computing system may segment the image data to isolate and identify at least a portion of the robotic limb within the scene. The computing system can determine a current pose of the robotic limb within the scene based on the image data, joint data, or a 3D virtual model of the robotic limb. The computing system may then determine a desired goal pose, which may be based on the image data or the 3D virtual model. Based on the determined goal pose, the computing device determines the difference between the current pose and the goal pose of the robotic limb, and using this difference, provides a pose adjustment that for the robotic limb.

The disclosure describes devices, systems and methods relating to a transfer chamber for an electronic device processing system. For example, a robot can include a first mover configured to be driven by a platform of a linear motor, a support structure disposed on the first mover, a first robot arm attached to the first end of the support structure at a shoulder axis, and a first arm drive assembly. The first drive assembly can include a first pulley attached to a first end of the support structure and to the first robot arm at the shoulder axis, a second pulley attached to a second end of the support structure, a first band connecting the first pulley to the second pulley, and a second mover configured to be driven by the platform of the linear motor, where the second mover is connected to the first band, and where motion of the second mover relative to the first mover causes the first band to a) rotate the first pulley and the second pulley and b) rotate the first robot arm around the shoulder axis. Also disclosed are systems and methods incorporating the robot.

A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

A robot controller includes an all-axes control part collectively calculating position command values for a plurality of axes based on a predetermined trajectory of the robot, and motor drive control parts for each axis. The motor drive control part includes a stopping position command calculation part which calculates a stopping position command value for each axis with a motor coordinate system as a reference. The motor drive control part switches the position command value transmitted from the all-axes control part to the stopping position command value for each axis when an emergency stop signal is inputted and, after that, returns from the stopping position command value for each axis to the position command value transmitted from the all-axes control part. The all-axes control part starts calculation for outputting an emergency stop position command value for stopping the robot on the predetermined trajectory when the emergency stop signal is inputted.

A method including: locating a shaft of a rotor relative to a stator of a motor, locating a robot arm mount on the shaft, temporarily stationarily fixing the robot arm mount relative to the stator at a predetermined rotational location relative to the stator, and while the robot arm mount is temporarily stationarily fixed relative to the stator at the predetermined rotational location, stationarily fixing the robot arm mount to the shaft by a connection, where the connection allows the robot arm mount to be stationarily fixed to the shaft at one of a plurality of angular orientations.

A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.