A method for determining a temperature compensation parameter for compensation of temperature effects on measured values of a sensor system having a sensor unit for acquiring measured values of a sensor measuring variable. The method includes: monitoring the measuring situation of the sensor unit; determining whether the current measuring situation corresponds to a reference measuring situation for which a reference measured value of the sensor measuring variable is known; monitoring the temperature of the sensor unit; determining whether the current temperature lies within a predefined temperature range; acquiring different temperature values within the predefined temperature range and acquiring the respective associated measured values of the sensor measuring variable when the current measuring situation corresponds to a reference measuring situation; determining a temperature compensation parameter based on the reference measured value of the sensor measuring variable, the different temperature values, and the associated measured values of the sensor measuring variable.

A MEMS apparatus with heater includes central part, periphery part, gap and first connecting part. Central part includes center of mass, heater and first joint. Heater is disposed inside central part. First joint is located on boundary of central part. Displacement of first joint is produced when central part is heated by heater. Periphery part surrounds central part. Gap surrounds central part, and is located between central part and periphery part. First connecting part connects central part and periphery part along first reference line and includes first inner connecting portion and first outer connecting portion. First inner connecting portion is connected to first joint. First outer connecting portion is connected to periphery part. First reference line passes through first joint, and first reference line is not parallel to line connecting center of mass and first joint.

A MEMS apparatus with heater includes central part, periphery part, gap and first connecting part. Central part includes center of mass, heater and first joint. Heater is disposed inside central part. First joint is located on boundary of central part. Displacement of first joint is produced when central part is heated by heater. Periphery part surrounds central part. Gap surrounds central part, and is located between central part and periphery part. First connecting part connects central part and periphery part along first reference line and includes first inner connecting portion and first outer connecting portion. First inner connecting portion is connected to first joint. First outer connecting portion is connected to periphery part. First reference line passes through first joint, and first reference line is not parallel to line connecting center of mass and first joint.

A method for determining a temperature compensation parameter for compensation of temperature effects on measured values of a sensor system having a sensor unit for acquiring measured values of a sensor measuring variable. The method includes: monitoring the measuring situation of the sensor unit; determining whether the current measuring situation corresponds to a reference measuring situation for which a reference measured value of the sensor measuring variable is known; monitoring the temperature of the sensor unit; determining whether the current temperature lies within a predefined temperature range; acquiring different temperature values within the predefined temperature range and acquiring the respective associated measured values of the sensor measuring variable when the current measuring situation corresponds to a reference measuring situation; determining a temperature compensation parameter based on the reference measured value of the sensor measuring variable, the different temperature values, and the associated measured values of the sensor measuring variable.