B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1/00
Manufacture or treatment of devices or systems in or on a substrate
1/00
Manufacture or treatment of devices or systems in or on a substrate
B81C1/00436
Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
B81C1/00436
Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
B81C1/00523
Etching material
B81C1/00523
Etching material