A method and alignment system for minimizing errors in the deposition of films of tailored thickness. A first position on a stage is identified for optimal placement of a downward looking microscope (DLM) and an upward looking microscope (ULM) when alignment marks on the DLM and ULM are aligned, where the DLM is attached to a bridge and the ULM is attached to the stage. A second position on the stage is identified when the ULM on the stage is aligned with the alignment marks on a metrology tool. A surface of a chucked substrate affixed to the stage is then measured. A map between a substrate coordinate system and a metrology coordinate system may then be obtained using the measured surface of the chucked substrate with the first and second positions.

A method for forming a biological microdevice includes applying a biocompatible coarse scale additive process with an additive device and a biocompatible material to form an object. The coarse scale is a dimension not less than about 100 μm. The method also includes applying a biocompatible fine scale subtractive process with a subtractive device to the object. The fine scale is a dimension not greater than about 1000 μm. The method also includes moving the object between the additive device and the subtractive device. A system is also provided for performing the above method and includes the additive device, the subtractive device, a means for transporting the object between the additive device and subtractive device and a processor with a memory including instructions to perform one or more of the above method steps.

A method for printing a structure, the structure including a plurality of pillars. The method for printing can include ejecting only a first drop of a print material such as a liquid metal sequentially at each of a plurality of pillar locations, then ejecting only a second drop of the print material sequentially onto the first drop at each of the plurality of print locations. Additional drops can be ejected at two or more of the pillar locations to form the plurality of pillars. Ejecting only a first drop at each pillar location allows the first drop to cure (i.e., cool or dry) before ejecting the second drop. The printer continues printing while the drops cure, thus improving processing efficiency and increasing production throughput.

A method for printing a structure, the structure including a plurality of pillars. The method for printing can include ejecting only a first drop of a print material such as a liquid metal sequentially at each of a plurality of pillar locations, then ejecting only a second drop of the print material sequentially onto the first drop at each of the plurality of print locations. Additional drops can be ejected at two or more of the pillar locations to form the plurality of pillars. Ejecting only a first drop at each pillar location allows the first drop to cure (i.e., cool or dry) before ejecting the second drop. The printer continues printing while the drops cure, thus improving processing efficiency and increasing production throughput.

Custom 3d printer and resin for microfluidic flow channels and 3D printed high density, reversible, chip-to-chip microfluidic interconnects.

A method and alignment system for minimizing errors in the deposition of films of tailored thickness. A first position on a stage is identified for optimal placement of a downward looking microscope (DLM) and an upward looking microscope (ULM) when alignment marks on the DLM and ULM are aligned, where the DLM is attached to a bridge and the ULM is attached to the stage. A second position on the stage is identified when the ULM on the stage is aligned with the alignment marks on a metrology tool. A surface of a chucked substrate affixed to the stage is then measured. A map between a substrate coordinate system and a metrology coordinate system may then be obtained using the measured surface of the chucked substrate with the first and second positions.

One example provides a microelectromechanical systems (MEMS) device that includes a number of silicon die over-molded with an overmold material, a number of active areas formed on the silicon die, the active areas including at least one sensor to sense a number of attributes of a fluid introduced to the at least one sensor, and a fan-out layer coupled to the silicon die, the fan-out layer including a number of fluid channels formed therein that interface with active areas of the silicon die and allow the fluid to flow to the at least one sensor.

The present disclosure is directed to tailoring the structure of freeform nanotube macrostructures through extrusion-based additive manufacturing for fabrication of planar and three-dimensional features and objects. Ink containing nanomaterials can be extruded into a fluid to precipitate into a fiber that can be used to form solid structures. The fluid can include a coagulant that promotes rapid solidification in the precipitation of fibers. The fluid can be disposed into a bath that is in fluid communication with the extruded ink. Systems and devices for executing such processes, are also provided.

Custom 3d printer and resin for microfluidic flow channels and 3D printed high density, reversible, chip-to-chip microfluidic interconnects.

A method for forming a biological microdevice includes applying a biocompatible coarse scale additive process with an additive device and a biocompatible material to form an object. The coarse scale is a dimension not less than about 100 m. The method also includes applying a biocompatible fine scale subtractive process with a subtractive device to the object. The fine scale is a dimension not greater than about 1000 m. The method also includes moving the object between the additive device and the subtractive device. A system is also provided for performing the above method and includes the additive device, the subtractive device, a means for transporting the object between the additive device and subtractive device and a processor with a memory including instructions to perform one or more of the above method steps.