A MEMS device formed by a substrate, having a surface; a MEMS structure arranged on the surface; a first coating region having a first Young's modulus, surrounding the MEMS structure at the top and at the sides and in contact with the surface of the substrate; and a second coating region having a second Young's modulus, surrounding the first coating region at the top and at the sides and in contact with the surface of the substrate. The first Young's modulus is higher than the second Young's modulus.

A MEMS device formed by a substrate, having a surface; a MEMS structure arranged on the surface; a first coating region having a first Young's modulus, surrounding the MEMS structure at the top and at the sides and in contact with the surface of the substrate; and a second coating region having a second Young's modulus, surrounding the first coating region at the top and at the sides and in contact with the surface of the substrate. The first Young's modulus is higher than the second Young's modulus.

A MEMS device formed by a substrate, having a surface; a MEMS structure arranged on the surface; a first coating region having a first Young's modulus, surrounding the MEMS structure at the top and at the sides and in contact with the surface of the substrate; and a second coating region having a second Young's modulus, surrounding the first coating region at the top and at the sides and in contact with the surface of the substrate. The first Young's modulus is higher than the second Young's modulus.

A device for nano-assembly of nanoparticles in nanoimprinted wells on a substrate surface includes a substrate holder, a platen, a heater and a conveyor. The substrate holder is arranged to support the substrate. The platen is arranged to have a print gap between the substrate and platen, the print gap containing a nanoink having a carrier fluid and nanoparticles within the carrier fluid. The heater is configured to provide heat to the substrate holder. The conveyor is configured to move the substrate relative to the platen such that nanoparticles are nanoassembled into the nanoimprinted wells as the substrate traverses a carrier fluid filled nano-assembly area by motion of the substrate holder.