Embodiments of the disclosure provide a method for designing an optical scanning mirror. The method may include receiving an initial set of design parameters for the scanning mirror assembly. The method may also include simulating first scanning mirror oscillation based on the initial set of design parameters to compute an initial non-linear spring constant associated with at least one spring of the scanning mirror assembly. The method may further include adjusting the set of design parameters for the scanning mirror assembly based on a comparison between the initial non-linear spring constant and a target non-linear spring constant. The method may also include outputting the at least one structural alteration to be implemented on the at least one spring. In certain aspects, the initial set of design parameters and the adjusted set of design parameters may be associated with a same mirror oscillation frequency and linear spring constant.

There is provided a MEMS resonator comprising a support structure, a distributed cross-sectional resonator element with a particular eigenmode, at least one anchor coupling the distributed cross-sectional resonator element to the support structure, at least one drive electrode for actuating the particular eigenmode, and at least one sense electrode for sensing the particular eigenmode. The particular eigenmode is defined by a propagating series of modes, such as a plurality of Lamé modes. The MEMS resonator may be homogenously doped with one of N-type or P-type dopants, such that a second order temperature coefficient of frequency of the distributed cross-sectional resonator element is about zero. Additionally, the first order temperature coefficient of frequency may be reduced to about zero by modifying the ratio of elongation of the distributed cross-sectional resonator element or by modifying the material composition of the distributed cross-sectional resonator element.

The present invention relates to a method for manufacturing a microfluidic device. The microfluidic device includes an input zone adapted to receive a carrier fluid medium and a sample in suspension in the carrier fluid medium, the sample comprising at least one population of cells or microparticles, a confinement zone adapted to confine a selected amount of the sample, and an output zone adapted to discharge the carrier fluid medium and the sample in suspension in the carrier fluid medium.

A micromechanical device and a corresponding manufacturing method. The micromechanical device includes: a spring element which is moveably coupleable or is moveably coupled to a frame unit at at least one connecting point of the spring element, the spring element including at least one web, which extends outward from the at least one connecting point; and the at least one web being structured in such a way that it includes at least one first section as well as at least one widening section for reducing a non-linearity of the spring element, which is widened compared to the first section.

The invention is directed to a microfluidic device, which comprises distinct, parallel levels, including a first level and a second level. It further includes: a first microchannel, a second microchannel, and a node. This node comprises: an inlet port, a cavity, a via, and an outlet port. The cavity is formed on the first level and is open on a top side. The inlet port is defined on the first level; it branches from the first microchannel and communicates with the cavity through an ingress thereof. The outlet port, branches to the second microchannel on the second level. The via extends from the bottom side of the cavity, down to the outlet port, so the cavity may communicate with the outlet port. In addition, the cavity comprises a liquid blocking element to prevent an aqueous liquid filling the inlet port to reach the outlet port.

In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.

A method of developing a physical design layout of microfluidic system chip can include receiving a planarized graph of a netlist including vertices representing microfluidic components. The vertices can be expanded into components, where each component includes a first dimension and a second dimension. The components can be shifted to a position where the first and second dimension of each component do not overlap with the first dimension and the second dimension of any other component. A flow route can be determined based on the first and second dimension of each component and the position of each component, the flow route including channels connecting two or more of the components.

A system and method for extracting relevant computational data are disclosed. In one embodiment, one or more physical quantities and/or one or more functions of physical quantities of interest, associated with a larger volume, to be measured are identified. Further, any non-available identified functions of physical quantities are computed for each smaller volume of the larger volume using the available physical quantities in the computational data. Furthermore, regions in computational domain are identified along with ranges of identified physical quantities and functions of physical quantities of interest for carrying out the extraction from the computational data. Moreover, geometrical and connectivity information of smaller volumes associated with the identified regions/ranges that are obtained by filtering the computational data associated with the larger volume are obtained. Also, one or more clusters of smaller volumes are obtained using the obtained geometrical and connectivity information of smaller volumes associated with the identified regions/ranges.

In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.

The invention is directed to a microfluidic device, which comprises distinct, parallel levels, including a first level and a second level. It further includes: a first microchannel, a second microchannel, and a node. This node comprises: an inlet port, a cavity, a via, and an outlet port. The cavity is formed on the first level and is open on a top side. The inlet port is defined on the first level; it branches from the first microchannel and communicates with the cavity through an ingress thereof. The outlet port, branches to the second microchannel on the second level. The via extends from the bottom side of the cavity, down to the outlet port, so the cavity may communicate with the outlet port. In addition, the cavity comprises a liquid blocking element to prevent an aqueous liquid filling the inlet port to reach the outlet port.