A purification method for an aqueous hydrogen peroxide solution, includes passing the aqueous hydrogen peroxide solution through a first H-form strong cation exchange resin column 1, a salt-form strong anion exchange resin column 2 and a second H-form strong cation exchange resin column 3. An H-form strong cation exchange resin having crosslinking of 6% or less, an H-form strong cation exchange resin having crosslinking of 9% or more, or an H-form strong cation exchange resin produced by steps (a) and (b) is used as an H-form strong cation exchange resin packed in the second H-form strong cation exchange resin column 3: (a) copolymerizing a monovinyl aromatic monomer with a crosslinkable aromatic monomer having a non-polymerizable impurity content of 3% by weight or less therein using a predetermined amount of a specified radical polymerization initiator at a predetermined polymerization temperature to obtain a crosslinked copolymer; and (b) sulfonating the crosslinked copolymer.

A process for the purification of an aqueous hydrogen peroxide solution includes the following steps: (a) the treatment of an aqueous hydrogen peroxide solution with at least one first reverse osmosis system, (b) the treatment of the obtained hydrogen peroxide solution with at least one first stabilizer, (c) the treatment of the obtained hydrogen peroxide solution with at least one purification mean selected from adsorption resins, ion exchange resins, and combinations thereof.

An aqueous hydrogen peroxide solution obtainable thereby is described. The use of the aqueous hydrogen peroxide solution in the manufacture of microelectronic components and semiconductors is also described.

The present invention relates to a method for purifying hydrogen peroxide, and more particularly, to a method including purifying a crude product of hydrogen peroxide using a primary purification system, and purifying a primarily purified hydrogen peroxide solution using a secondary purification system. One of the primary purification system and the secondary purification system includes an electrodeionization system, and the other one of the primary purification system and the secondary purification system includes at least one from among a distillation system, a resin system, a reverse osmosis system, and a combination system thereof.

A method of removing hydrogen peroxide from sulfuric acid includes the following steps: First step of pouring the sulfuric acid having 0.1 wt % to 10 wt % of hydrogen peroxide into a vessel. Second step of adding a catalyst containing copper and a copper compound to the vessel to undergo a reaction with the sulfuric acid to remove the hydrogen peroxide from the sulfuric acid, to generate heat, and to generate metal ions in the sulfuric acid. Third step of activating a cooling device to cool the vessel to a predetermined temperature range. Fourth step of adding hydrogen sulfide to the vessel to undergo a reaction with the metal ions to generate metallic sulfide and metal free sulfuric acid. Fifth step of purifying the metallic sulfide and the metal free sulfuric acid to obtain purified metallic sulfide and purified sulfuric acid as products.

Disclosed is a production device and production method of an electronic grade hydrogen peroxide aqueous solution. An industrial grade hydrogen peroxide is subjected to rectification, reverse osmosis, ion exchange, and finally filtered through an ultrafiltration membrane, and an electronic grade hydrogen peroxide aqueous solution is obtained. Through the above-mentioned integrated design, the disclosure overcomes the problems of small yield and low purity in the prior art, and the method for producing electronic grade hydrogen peroxide has low energy consumption, low cost and high profit, and is suitable for continuous mass production.

A method of removing hydrogen peroxide from sulfuric acid includes pouring sulfuric acid (H.sub.2SO.sub.4) having 0.1% to 10% of hydrogen peroxide (H.sub.2O.sub.2) into a vessel; adding a catalyst containing metal or metal compound to the vessel to undergo a reaction with the sulfuric acid (H.sub.2SO.sub.4) to remove hydrogen peroxide (H.sub.2O.sub.2) from the sulfuric acid (H.sub.2SO.sub.4), to generate heat, and to generate metal ions in the sulfuric acid (H.sub.2SO.sub.4); activating a cooling device to cool the vessel to a predetermined temperature range; adding sulfur (S.sup.2) to the vessel to undergo a reaction with the metal ions to generate metallic sulfide; and purifying the metal free sulfuric acid (H.sub.2SO.sub.4) to obtain the metallic sulfide and highly purified, diluted sulfuric acid (H.sub.2SO.sub.4) as products.

A purification method for an aqueous hydrogen peroxide solution includes subjecting the aqueous hydrogen peroxide solution to a reverse osmosis membrane separation treatment with a high-pressure reverse osmosis membrane separation device. The high-pressure reverse osmosis membrane has a denser skin layer on the membrane surface and is therefore lower in an amount of membrane permeate water per unit operating pressure but higher in the rejection rate of TOC and boron, as compared with a low-pressure or ultralow-pressure reverse osmosis membrane. The high-pressure reverse osmosis membrane permeate water is preferably further subjected to an ion exchange treatment with an ion exchange device including two or more columns packed with gel-type strong ion exchange resins.

A purification method for an aqueous hydrogen peroxide solution, includes passing the aqueous hydrogen peroxide solution through a first H-form strong cation exchange resin column 1, a salt-form strong anion exchange resin column 2 and a second H-form strong cation exchange resin column 3. An H-form strong cation exchange resin having crosslinking of 6% or less, an H-form strong cation exchange resin having crosslinking of 9% or more, or an H-form strong cation exchange resin produced by steps (a) and (b) is used as an H-form strong cation exchange resin packed in the second H-form strong cation exchange resin column 3: (a) copolymerizing a monovinyl aromatic monomer with a crosslinkable aromatic monomer having a non-polymerizable impurity content of 3% by weight or less therein using a predetermined amount of a specified radical polymerization initiator at a predetermined polymerization temperature to obtain a crosslinked copolymer; and (b) sulfonating the crosslinked copolymer.

Compositions, methods, devices, and systems for purifying a source liquid from a replenishment stock solution that includes stabilizing agents, such as metal ions, prior to vaporization. Certain embodiments effect the purification with a solid perfluoronated ionomer, such as a perfluoronated ionomer membrane. Advantageously, source liquids purified in this manner provide feed stocks for production of ultra-pure gaseous reagents. As well, performance characteristics of membrane-based vaporizers relying on transport processes are improved.

The present disclosure relates to a method and an apparatus for purifying an aqueous hydrogen peroxide solution. According to the present disclosure, it is possible to provide a method and an apparatus for purifying an aqueous hydrogen peroxide solution, which may control a generated gas because there is no partial drying of an ion-exchange resin when purifying the aqueous hydrogen peroxide solution using the ion-exchange resin, require no facility expansion, and may provide a high-purity aqueous hydrogen peroxide solution.