An aluminum nitride film includes a polycrystalline aluminum nitride. A withstand voltage of the aluminum nitride film is 100 kV/mm or more.

Provided is an aluminum nitride structure that includes a plurality of aluminum nitride particles, wherein aluminum nitride particles that are adjacent are bound to each other through a boehmite phase containing boehmite, and the porosity is 30% or less. Also provided is a method for producing an aluminum nitride structure that includes: obtaining a mixture by mixing an aluminum nitride powder with a solvent containing water; and pressurizing and heating the mixture under conditions of a pressure of 10 to 600 MPa and a temperature of 50 to 300° C.

A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle. The content of carbon atoms is less than 1000 ppm by mass, and an Si/Al atom ratio of the surface as measured by AES analysis is 0.29 or more and 5.0 or less. In another aspect, the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less.

The purpose of the present is to provide a modified AlN source for suppressing downfall defects. This manufacturing method of a modified aluminum nitride source involves a heat treatment step for heat treating an aluminum nitride source and generating an aluminum nitride sintered body.

Glass-coated aluminum nitride particles and a method for producing the same. The glass-coated aluminum nitride particles include aluminum nitride particles and a glass phase which covers at least a part of the surface of each aluminum nitride particle. The glass phase is a composition which contains at least a glass component; and the proportion of the composition containing a glass component is 0.2 parts by weight to 5.0 parts by weight with respect to 100 parts by weight of the aluminum nitride particles. The composition containing the glass component further contains boron nitride particle; and the aluminum nitride particles have a volume cumulative d50 of from 10 μm to 200 μm.

An aluminum nitride powder containing a very small amount of coarse particles. An aluminum nitride powder which provides a resin composition having high affinity for resins and high moisture resistance. The aluminum nitride powder has a volume average particle diameter D50 of 0.5 to 7.0 μm in particle size distribution measured with a laser diffraction scattering particle size distribution meter, a D90/D50 ratio of 1.3 to 3.5 and a BET specific surface area of 0.4 to 6.0 m.sup.2/g and classified by removing coarse particles whose particle diameter is more than 5 times as large as D90. When resin paste obtained from this aluminum nitride powder and a resin is measured with a grind gauge, the upper limit particle diameter at which a streak is produced is not more than 5 times as large as D90. Since the classified aluminum nitride powder is surface modified, the aluminum nitride powder which has high filling property in a resin and is excellent in the moisture resistance and insulating property of a resin composition is obtained.

A method of manufacturing a silicon-containing oxide-coated aluminum nitride particle; a method of manufacturing a heat dispersing resin composition containing the silicon-containing oxide-coated aluminum nitride particle; and the silicon-containing oxide-coated aluminum nitride particle. The method of manufacturing includes: a first step of covering the surface of the aluminum nitride particle with an organic silicone compound including a specific structure; and a second step of heating the aluminum nitride particle covered with the organic silicone compound at a temperature of 300° C. or more and less than 1000° C., wherein the content of carbon atoms in the silicon-containing oxide-coated aluminum nitride particle is less than 1000 ppm by mass.

Provided is a spherical aluminum nitride powder having a particle shape that is closer to sphericity. The spherical aluminum nitride powder according to the present invention, which contains a main component comprising AlN and a side component comprising a rare earth compound, is characterized in that at least 70% of particles in the powder have an outer peripheral shape having neither an angular edge part nor an uneven part in the plane projection image of individual particles.

A method for producing silicon-containing oxide-coated aluminum nitride particles including aluminum nitride particles and a silicon-containing oxide coating covering a surface of each of the aluminum nitride particles. The method includes a first step including mixing aluminum nitride particles and an organic silicone compound solution in which an organic silicone compound containing a specific structure is dissolved in a solvent to form a mixture and then heating the mixture to remove the solvent and to obtain aluminum nitride particles coated with the organic silicone compound; and a second step including heating the aluminum nitride particles coated with the organic silicone compound at a temperature of 300° C. or more and 1,000° C. or less.

A method of manufacturing a silicon-containing oxide-coated aluminum nitride particle; a method of manufacturing a heat dispersing resin composition containing the silicon-containing oxide-coated aluminum nitride particle; and the silicon-containing oxide-coated aluminum nitride particle. The method of manufacturing includes: a first step of covering the surface of the aluminum nitride particle with an organic silicone compound including a specific structure; and a second step of heating the aluminum nitride particle covered with the organic silicone compound at a temperature of 300° C. or more and less than 1000° C., wherein the content of carbon atoms in the silicon-containing oxide-coated aluminum nitride particle is less than 1000 ppm by mass.