Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A method is provided for refining an argon gas, in which oxygen is added to the argon gas containing hydrogen, carbon monoxide (CO), and oxygen as impurities so that the hydrogen and the CO are converted into water and carbon dioxide in a catalyst tower, or hydrogen is added to the argon gas so that the oxygen is converted into the water; the method including: monitoring the hydrogen, the CO, and the oxygen on an outlet side of the catalyst tower; and at least one of adding the oxygen to the argon gas when any one of the hydrogen and the CO is detected on the outlet side of the catalyst tower, and adding the hydrogen when the oxygen is detected, wherein the oxygen or the hydrogen to be added is intermittently added to the catalyst tower relative to continuous supply of the argon gas to the catalyst tower.

In a helium purification process, a stream containing at least 10% of helium, at least 10% of nitrogen in addition to hydrogen and methane is separated to form a helium-enriched stream containing hydrogen, a first stream enriched in nitrogen and in methane and a second stream enriched in nitrogen and in methane, the helium-enriched stream is treated to produce a helium-rich product and a residual gas containing water, the residual gas is treated by adsorption (TSA) to remove the water and the regeneration gas from the adsorption is sent to a combustion unit (O).

In a helium purification process, a stream containing at least 10% of helium, at least 10% of nitrogen in addition to hydrogen and methane is separated to form a helium-enriched stream containing hydrogen, a first stream enriched in nitrogen and in methane and a second stream enriched in nitrogen and in methane, the helium-enriched stream is treated to produce a helium-rich product and a residual gas containing water, the residual gas is treated by adsorption (TSA) to remove the water and the regeneration gas from the adsorption is sent to a combustion unit (O).

In a helium purification process, a stream containing at least 10% of helium, at least 10% of nitrogen in addition to hydrogen and methane is separated to form a helium-enriched stream containing hydrogen, a first stream enriched in nitrogen and in methane and a second stream enriched in nitrogen and in methane, the helium-enriched stream is treated to produce a helium-rich product and a residual gas containing water, the residual gas is treated by adsorption (TSA) to remove the water and the regeneration gas from the adsorption is sent to a combustion unit (O).

A method is provided for refining an argon gas, in which oxygen is added to the argon gas containing hydrogen, carbon monoxide(CO), and oxygen as impurities so that the hydrogen and the CO are converted into water and carbon dioxide in a catalyst tower, or hydrogen is added to the argon gas so that the oxygen is converted into the water; the method including: monitoring the hydrogen, the CO, and the oxygen on an outlet side of the catalyst tower; and at least one of adding the oxygen to the argon gas when any one of the hydrogen and the CO is detected on the outlet side of the catalyst tower, and adding the hydrogen when the oxygen is detected, wherein the oxygen or the hydrogen to be added is intermittently added to the catalyst tower relative to continuous supply of the argon gas to the catalyst tower.

An argon gas recovering and purifying method including: introducing waste argon gas containing nitrogen, oxygen, and carbon monoxide from silicon single crystal manufacturing apparatus into waste argon gas storage tank; removing solid matters in pretreatment facility which removes the solid matters in waste argon gas; converting oxygen into water and converting carbon monoxide into carbon dioxide by catalytic reaction; removing the water, the carbon dioxide, and the nitrogen to obtain recovered gas, in the argon gas recovering and purifying method and an argon gas recovering and purifying apparatus, the catalytic reaction is carried out with compression heat alone by arranging a catalyst in a two-stage compressor, and the water is removed by a dryer in advance and then the nitrogen and the carbon dioxide are adsorbed and removed in an ordinary-temperature adsorption tower at the step of obtaining the recovered gas.

The present invention relates a process and apparatus that recovers a helium rich stream from a mixed gas having low concentrations of helium therein. More specifically, the invention relates to an integrated process and apparatus for treating a mixed feed gas from an operating process that produces a fluid product from natural gas containing helium, such as processes that produce ammonia, methanol, or liquid hydrocarbons.