Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A host material may be used for the separation of elements or compounds, wherein the host material is an organic molecular solid with suitable cavities for accommodating a guest material to be separated, and with interconnections between the cavities to allow the guest material to diffuse through the host material, and wherein said interconnections are closed for a proportion of the time or have a static pore limiting diameter which is smaller than the static dimension of the guest material. Applications include separations of rare gases, chiral molecules, and alkanes. One class of suitable host materials may be made by imine condensation.

Systems for recovering neon from used neon are provided. The systems can include a pretreatment component operatively coupled to receive used neon gas from a system for producing UV light using neon, and a capture component operatively coupled to the pretreatment component. Methods for recovering neon from used neon are also provided.

A method and system for collecting xenon (Xe) is described. A microchannel heat exchanger is used in combination with a mechanical cooler and an absorbent. A combination of components makes up a Xe Collection Subsystem that is adapted for use in an efficient process for collecting, purifying, and measuring Xe isotopes collected from air as part of the International Monitoring System.

A method and system for collecting xenon (Xe) is described. A microchannel heat exchanger is used in combination with a mechanical cooler and an absorbent. A combination of components makes up a Xe Collection Subsystem that is adapted for use in an efficient process for collecting, purifying, and measuring Xe isotopes collected from air as part of the International Monitoring System.

A method and system for collecting xenon (Xe) is described. A microchannel heat exchanger is used in combination with a mechanical cooler and an absorbent. A combination of components makes up a Xe Collection Subsystem that is adapted for use in an efficient process for collecting, purifying, and measuring Xe isotopes collected from air as part of the International Monitoring System.

A method and system for collecting xenon (Xe) is described. A microchannel heat exchanger is used in combination with a mechanical cooler and an absorbent. A combination of components makes up a Xe Collection Subsystem that is adapted for use in an efficient process for collecting, purifying, and measuring Xe isotopes collected from air as part of the International Monitoring System.

An argon gas recovering and purifying method including: introducing waste argon gas containing nitrogen, oxygen, and carbon monoxide from silicon single crystal manufacturing apparatus into waste argon gas storage tank; removing solid matters in pretreatment facility which removes the solid matters in waste argon gas; converting oxygen into water and converting carbon monoxide into carbon dioxide by catalytic reaction; removing the water, the carbon dioxide, and the nitrogen to obtain recovered gas, in the argon gas recovering and purifying method and an argon gas recovering and purifying apparatus, the catalytic reaction is carried out with compression heat alone by arranging a catalyst in a two-stage compressor, and the water is removed by a dryer in advance and then the nitrogen and the carbon dioxide are adsorbed and removed in an ordinary-temperature adsorption tower at the step of obtaining the recovered gas.