Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A method of obtaining helium from a process gas. The process gas is at a pressure less than 15 bar to a first membrane separation stage having a first membrane more readily permeable for helium than for at least one other component in the process gas. A first retentate stream is fed to a second membrane separation stage having a second membrane more readily permeable for helium than for at least one other component in the process gas. Helium is separated from a first helium-containing permeate stream using a pressure swing adsorption to obtain a helium-containing product stream. A second helium-containing permeate stream is recycled to the first membrane separation stage. A purge gas from the pressure swing adsorption is also recycled to the first membrane separation stage.

Recovering helium from a gaseous stream includes contacting an acid gas removal membrane with a gaseous stream to yield a permeate stream and a residual stream, removing a majority of the acid gas from the residual stream to yield a first acid gas stream and a helium depleted clean gas stream, removing a majority of the acid gas from the permeate stream to yield a second acid gas stream and a helium rich stream, and removing helium from the helium rich stream to yield a helium product stream and a helium depleted stream. A helium removal system for removing helium from a gaseous stream including hydrocarbon gas, acid gas, and helium includes a first processing zone including a first acid gas removal unit, a second processing zone including a second acid gas removal unit, a third processing zone, and a helium purification unit.

According to one embodiment, a gas recovering apparatus includes a casing and a tube. The casing is provided with an inlet through which a gas flows in, a first outlet for discharging a first gas containing a gas to be recovered of the gas, and a second outlet for discharging a second gas other than the first gas of the gas. The casing is evacuated via the first outlet. The tube is provided in the casing from the inlet to the second outlet, and has a high permeability to the first gas and a low permeability to the second gas.

In a helium purification process, a stream containing at least 10% of helium, at least 10% of nitrogen in addition to hydrogen and methane is separated to form a helium-enriched stream containing hydrogen, a first stream enriched in nitrogen and in methane and a second stream enriched in nitrogen and in methane, the helium-enriched stream is treated to produce a helium-rich product and a residual gas containing water, the residual gas is treated by adsorption (TSA) to remove the water and the regeneration gas from the adsorption is sent to a combustion unit (O).

A method for extending useful life of a sorbent for purifying a gas by sorption of an impurity is provided. The method generating a electrical discharge within the gas to obtain a spectral emission representative of a concentration of the impurity. The method also includes monitoring the concentration of the impurity according to the spectral emission. The method also includes lowering the concentration of the impurity by conversion of at least a portion of the impurity into a secondary impurity having a greater affinity to the sorbent than the impurity. The method also includes comparing the concentration of the impurity to a polluting concentration and managing the sorption of the gas onto the sorbent according to the comparison.

A process for recovery of helium from one or more than one helium-containing off-gas streams comprises preconditioning off-gas through a multi-stage preconditioning device, cryogenically separating a helium-enriched gas fraction from the preconditioned off-gas received from the preconditioning device a cryogenic separation device, and purifying the helium-enriched gas fraction received from the cryogenic separation device using a purification device so as to obtain purified helium gas with a higher helium content than the helium-enriched gas.

The invention provides a method and system for separating xenon-krypton mixed gas by hydrate formation process. The system is mainly composed of a gas hydrate generating unit, a heat exchanging unit and a gas-water separating unit: pre-cooled xenon-krypton mixed gas is injected from a bottom of a reaction tower, xenon gas in the mixed gas and water attached to a porous tray generate a xenon gas hydrate; and water is injected from a top of the tower to wet the porous tray, a generated hydrate particle is washed and collected to the bottom of the tower simultaneously to form a hydrate slurry, after passing through the heat exchanging unit, the xenon gas hydrate in the slurry is decomposed to form a gas phase flow and a water phase flow, and then enters the gas-water separating unit, and the xenon gas is separated from decomposed water.