Disclosed is a process for producing a fluoride gas that can produces fluoride gases such as BF.sub.3, SiF.sub.4, GeF.sub.4, PF.sub.5 or AsF.sub.5 at a reduced production cost in a simple manner. The process is characterized in that a compound containing an atom, which, together with a fluorine atom, can form a polyatomic ion, is added to a hydrogen fluoride solution to produce the polyatomic ion in a hydrogen fluoride solution and to evolve a fluoride gas comprising the fluorine atom and the atom that, together with the fluorine atom, can form a polyatomic ion.

The present disclosure discloses a method for graded utilization of fluorine and silicon resources in a phosphate ore. While the phosphate ore reacts with sulfuric acid, a fluorine-containing and silicon-containing tail gas is produced. SiO.sub.2 and H.sub.2SiF.sub.6 solution with a high concentration are obtained by concentrating and filtering a solution containing HF and H.sub.2SiF.sub.6 formed after tail gas is absorbed by water. Crude SiF.sub.4 and a solution containing HF and H.sub.2SO.sub.4 are obtained by extracting, adsorbing, and dehydrating the H.sub.2SiF.sub.6 solution. SiF.sub.4 with a 5N purity is obtained after the crude SiF.sub.4 is adsorbed and distilled, at the same time, an impurity-enriched SiF.sub.4 is returned to operations of concentration and filtration to react with the solution containing HF and H.sub.2SiF.sub.6 to generate the H.sub.2SiF.sub.6 and SiO.sub.2. High-purity HF and waste sulfuric acid are obtained after the H.sub.2SO.sub.4 solution containing HF is separated by steam stripping and distillation.

Compositions suitable for reversibly storing heat in thermal energy systems (TES) include a salt hydrate represented by the formula: MX.sub.q.nH.sub.2O. M is a cation selected from Groups 1 to 14 of the IUPAC Periodic Table, X is a halide of Group 17, q ranges from 1 to 4, and n ranges from 1 to 12. The cation (M) may have an electronegativity of ≤ about 1.8 and a molar mass ≤ about 28 g/mol. The anion (X) may have an electronegativity of ≥ about 2.9 to ≤ about 3.2. A distance between a cation (M) and coordinating water molecules (H.sub.2O) is ≤ about 2.1 Å. Thermal energy systems (TES) incorporating such compositions are also provided that are configured to reversibly store heat in the thermal energy system (TES) via an endothermic dehydration reaction and to release heat in in the thermal energy system (TES) via an exothermic hydration reaction.

The present disclosure discloses a method for graded utilization of fluorine and silicon resources in a phosphate ore. While the phosphate ore reacts with sulfuric acid, a fluorine-containing and silicon-containing tail gas is produced. SiO.sub.2 and H.sub.2SiF.sub.6 solution with a high concentration are obtained by concentrating and filtering a solution containing HF and H.sub.2SiF.sub.6 formed after tail gas is absorbed by water. Crude SiF.sub.4 and a solution containing HF and H.sub.2SO.sub.4 are obtained by extracting, adsorbing, and dehydrating the H.sub.2SiF.sub.6 solution. SiF.sub.4 with a 5N purity is obtained after the crude SiF.sub.4 is adsorbed and distilled, at the same time, an impurity-enriched SiF.sub.4 is returned to operations of concentration and filtration to react with the solution containing HF and H.sub.2SiF.sub.6 to generate the H.sub.2SiF.sub.6 and SiO.sub.2. High-purity HF and waste sulfuric acid are obtained after the H.sub.2SO.sub.4 solution containing HF is separated by steam stripping and distillation.

Compositions suitable for reversibly storing heat in thermal energy systems (TES) include a salt hydrate represented by the formula: MX.sub.q.Math.nH.sub.2O. M is a cation selected from Groups 1 to 14 of the IUPAC Periodic Table, X is a halide of Group 17, q ranges from 1 to 4, and n ranges from 1 to 12. The cation (M) may have an electronegativity of about 1.8 and a molar mass about 28 g/mol. The anion (X) may have an electronegativity of about 2.9 to about 3.2. A distance between a cation (M) and coordinating water molecules (H.sub.2O) is about 2.1 . Thermal energy systems (TES) incorporating such compositions are also provided that are configured to reversibly store heat in the thermal energy system (TES) via an endothermic dehydration reaction and to release heat in in the thermal energy system (TES) via an exothermic hydration reaction.

A process includes providing a reactor containing a compound of the formula SiO.sub.x, wherein 0x2, and receiving, at the reactor, fluorinated gas. The process also includes obtaining a gaseous mixture formed at an elevated temperature in the reactor and removing silicon tetrafluoride from the gaseous mixture. An apparatus includes a reactor containing a compound of the formula SiO.sub.x, wherein 0x2, a component for receiving fluorinated gas at the reactor, a heating element for heating the compound of the formula SiO.sub.x and the fluorinated gas in the reactor, and a separation component for removing silicon tetrafluoride from a gaseous mixture formed in the reactor. A process of semiconductor manufacturing includes defluorinating exhaust gas using the process. A system for semiconductor manufacturing includes a set of components for carrying out the process.

The present application provides a method for fluorine separation and recovery from phosphate rock enhanced with a microbubble coupled silicon additive, which includes: mixing the phosphate rock, phosphoric acid, and an active silicon additive, and subjecting the mixture to reaction to obtain a slurry; subjecting the slurry to microbubble generation treatment to obtain a microbubble slurry, and subjecting the microbubble slurry to recycling and returning to the reaction, where a released volatile fluoride is recovered; and after completing the reaction, a defluorinated slurry is obtained; and subjecting the obtained defluorinated slurry to acid-decomposition reaction and then solid-liquid separation to obtain phosphoric acid and phosphogypsum. In the method provided by the present application, a synergistic effect of microbubbles and the active silicon additive is used in the phosphoric acid acid-decomposition of phosphate rock, enhancing the fluorine impurities in phosphate rock to convert into volatile fluoride SiF4 and HF, achieving the highly efficient separation and recovery of fluorine, and a recovery rate of fluorine reaches 43.9% or more; moreover, the fluorine impurities are separated from the source in the acid decomposition of phosphate rock, thereby preventing fluorine from entering the subsequent wet phosphoric acid process.