A gas nozzle (100), a gas reaction device (10) and a gas hydrolysis reaction method. A plurality of fuel gas channels (116) are provided on a side wall of a nozzle cavity (110) of the gas nozzle (100); the plurality of fuel gas channels (116) are arranged around the side wall of the nozzle cavity (110); a mixed gas introduced from a nozzle inlet (112) is surrounded by a fuel gas (21) introduced from the plurality of fuel gas channels (116); and the fuel gas channels (116) are inclined towards a nozzle outlet (114), and the fuel gas channels (116) are further inclined in the same clockwise direction. In this way, the fuel gas (21) introduced from the plurality of fuel gas channels (116) forms a downwardly conical spiral flame, and a flame formed by the mixed gas introduced from the nozzle inlet (112) is wrapped therein and sprayed out from the nozzle outlet (114).

Disclosed is a production device and production method of electronic grade hydrofluoric acid. The method includes vaporizing the raw material industrial anhydrous hydrogen fluoride by an evaporator, transporting the vaporized hydrogen fluoride to a purification tower, obtaining a high purity hydrogen fluoride gas through rectification, transporting the high purity hydrogen fluoride gas to an absorption tower for absorption by a certain concentration of hydrofluoric acid in the liquid phase, obtaining the crude electronic grade hydrofluoric acid, and obtaining the electronic grade hydrofluoric acid product through ultrapure filtration. The disclosure overcomes the technical problems of small yield and low purity of the prior art. The production process meets the requirements of environmental protection. The disclosure is suitable for industrialized large-scale production.

The present invention provides a novel method for producing hydrogen fluoride which can suppress the occurrence of the pasty state over the whole process of producing hydrogen fluoride, reduce the problem of corrosion caused by sulfuric acid, and improve energy efficiency of the process. A method for producing hydrogen fluoride by reacting calcium fluoride and sulfuric acid comprises: (a) mixing and reacting calcium fluoride and sulfuric acid such that a mixture comprising calcium fluoride particles and sulfuric acid substantially maintains a form of particulate to obtain hydrogen fluoride while supplying sulfuric acid to the calcium fluoride particles at a flow rate of 0.002 to 1 mol/min relative to 1 mol of calcium fluoride to such an amount that a molar ratio of sulfuric acid/calcium fluoride is 0.9 to 1.1.

This disclosure provides a novel azeotrope-like composition and a separation method using the composition. The disclosure provides an azeotrope-like composition comprising 1,2-difluoroethylene (HFO-1132) and hydrogen fluoride; an azeotrope-like composition comprising 1,1,2-trifluoroethylene (HFO-1123) and hydrogen fluoride; and a separation method of a composition comprising hydrogen fluoride and at least one member selected from the group consisting of trans-1,2-difluoroethylene (HFO-1132(E)), cis-1,2-difluoroethylene (HFO-1132(Z)), and 1,1,2-trifluoroethylene (HFO-1123).

A process for treating an ammonium fluorosulfate byproduct includes providing an ammonium fluorosulfate byproduct including primarily ammonium fluorosulfate and lesser amounts of fluorosulfonic acid and bis(fluorosulfonyl) imide, mixing the ammonium fluorosulfate byproduct with water, reacting the mixture of the ammonium fluorosulfate byproduct and the water at a hydrolysis reaction temperature to hydrolyze the ammonium fluorosulfate, the fluorosulfonic acid and the bis(fluorosulfonyl) imide to form ammonium bisulfate and aqueous hydrogen fluoride; and separating the ammonium bisulfate from the aqueous hydrogen fluoride.

A dry non-plasma treatment system for removing material is described. The treatment system is configured to provide chemical treatment of one or more substrates, wherein each substrate is exposed to a gaseous chemistry under controlled conditions including surface temperature and gas pressure. Furthermore, the treatment system is configured to provide thermal treatment of each substrate, wherein each substrate is thermally treated to remove the chemically treated surfaces on each substrate.

The present disclosure discloses a method for graded utilization of fluorine and silicon resources in a phosphate ore. While the phosphate ore reacts with sulfuric acid, a fluorine-containing and silicon-containing tail gas is produced. SiO.sub.2 and H.sub.2SiF.sub.6 solution with a high concentration are obtained by concentrating and filtering a solution containing HF and H.sub.2SiF.sub.6 formed after tail gas is absorbed by water. Crude SiF.sub.4 and a solution containing HF and H.sub.2SO.sub.4 are obtained by extracting, adsorbing, and dehydrating the H.sub.2SiF.sub.6 solution. SiF.sub.4 with a 5N purity is obtained after the crude SiF.sub.4 is adsorbed and distilled, at the same time, an impurity-enriched SiF.sub.4 is returned to operations of concentration and filtration to react with the solution containing HF and H.sub.2SiF.sub.6 to generate the H.sub.2SiF.sub.6 and SiO.sub.2. High-purity HF and waste sulfuric acid are obtained after the H.sub.2SO.sub.4 solution containing HF is separated by steam stripping and distillation.

A method for measuring the concentration of fluorine gas (F.sub.2) contained in a halogen fluoride-containing gas using an analysis apparatus having a halogen fluoride-containing gas supply source, a fluorine-containing gas supply source, a tube, a capillary, and a mass spectrometer, the method including, before measuring the concentration of fluorine gas, performing passivation treatment on the tube and the capillary using a passivation gas containing a fluorine-containing gas supplied from the fluorine-containing gas supply source.

A process for treating an ammonium fluorosulfate byproduct includes providing an ammonium fluorosulfate byproduct including primarily ammonium fluorosulfate and lesser amounts of fluorosulfonic acid and bis(fluorosulfonyl) imide, mixing the ammonium fluorosulfate byproduct with water, reacting the mixture of the ammonium fluorosulfate byproduct and the water at a hydrolysis reaction temperature to hydrolyze the ammonium fluorosulfate, the fluorosulfonic acid and the bis(fluorosulfonyl) imide to form ammonium bisulfate and aqueous hydrogen fluoride; and separating the ammonium bisulfate from the aqueous hydrogen fluoride.

The invention relates to a method for treating fluoride-containing, in particular HF containing wastewater to remove fluoride and to a corresponding apparatus. In the new method calcium carbonate is reacted in a reaction step at an acidic pH≤4 with the fluoride in the wastewater to form calcium fluoride particles. Then, in a subsequent filtration step said calcium fluoride particles are separated by a porous membrane from the treated wastewater. The inventive apparatus comprises at least one reaction container/tank for reacting calcium carbonate at an acidic pH≤4 with fluoride in the wastewater to form calcium fluoride particles, as well as at least one porous membrane, in particular at least one porous ceramic membrane for separating calcium fluoride particles from the treated wastewater in a filtration step.