Methods are provided herein for forming transition metal oxide thin films, preferably Group IVB metal oxide thin films, by atomic layer deposition. The metal oxide thin films can be deposited at high temperatures using metalorganic reactants. Metalorganic reactants comprising two ligands, at least one of which is a cycloheptatriene or cycloheptatrienyl (CHT) ligand are used in some embodiments. The metal oxide thin films can be used, for example, as dielectric oxides in transistors, flash devices, capacitors, integrated circuits, and other semiconductor applications.

Methods are provided herein for forming transition metal oxide thin films, preferably Group IVB metal oxide thin films, by atomic layer deposition. The metal oxide thin films can be deposited at high temperatures using metalorganic reactants. Metalorganic reactants comprising two ligands, at least one of which is a cycloheptatriene or cycloheptatrienyl (CHT) ligand are used in some embodiments. The metal oxide thin films can be used, for example, as dielectric oxides in transistors, flash devices, capacitors, integrated circuits, and other semiconductor applications.

A process for gas-phase synthesis of titanium dioxide aerosol gels with controlled monomer size and crystalline phase using a diffusion flame aerosol reactor operated in a buoyancy-opposed configuration is disclosed. The process includes introducing a precursor stream into a diffusion flame aerosol reactor, introducing a fuel stream into the reactor, combusting the precursor stream and the fuel stream in a flame to form at least one nanoparticle, and operating the reactor in a down-fired buoyancy-opposed configuration to produce the aerosol gel.

A process for gas-phase synthesis of titanium dioxide aerosol gels with controlled monomer size and crystalline phase using a diffusion flame aerosol reactor operated in a buoyancy-opposed configuration is disclosed. The process includes introducing a precursor stream into a diffusion flame aerosol reactor, introducing a fuel stream into the reactor, combusting the precursor stream and the fuel stream in a flame to form at least one nanoparticle, and operating the reactor in a down-fired buoyancy-opposed configuration to produce the aerosol gel.

Provided is a fine particle production apparatus and a fine particle production method capable of easily obtaining surface treated fine particles. The fine particle production apparatus produces fine particles using feedstock by means of a gas-phase process. The apparatus includes a treatment section configured to transform the feedstock into a mixture in a gas phase state by means of the gas-phase process, a feedstock supply section configured to supply the feedstock to the treatment section, a cooling section configured to cool the mixture in a gas phase state in the treatment section using a quenching gas containing an inert gas, and a supply section configured to supply a surface treating agent to fine particle bodies in a temperature region in which the surface treating agent is not denatured, the fine particle bodies being produced by cooling the mixture in the gas phase state with the quenching gas.

The disclosure related to a method for making a nanowire structure. First, a free-standing carbon nanotube structure is suspended. Second, a metal layer is coated on a surface of the carbon nanotube structure. The metal layer is oxidized to grow metal oxide nanowires.

The disclosure related to a method for making a nanowire structure. First, a free-standing carbon nanotube structure is suspended. Second, a metal layer is coated on a surface of the carbon nanotube structure. The metal layer is oxidized to grow metal oxide nanowires.

A method to recycle TiB2 articles, and in particular, a method to recycle a TiB2 feedstock including TiB2 articles and Ti-ore and/or Ti-slag by chlorination.

A method to recycle TiB2 articles, and in particular, a method to recycle a TiB2 feedstock including TiB2 articles and Ti-ore and/or Ti-slag by chlorination.

Combustion apparatuses (e.g., burners) and methods, such as those configured to encourage mixing of fluid, flame stability, and synthesis of materials (e.g., nano-particles), among other things.