A method of forming an optical fiber preform includes the steps: igniting a burner having a fume tube assembly to produce a first spray size of silicon dioxide particles; depositing the silicon dioxide particles on a core cane to produce a soot blank; and adjusting an effective diameter of an aperture of the fume tube assembly to produce a second spray size of the silicon dioxide particles. The second spray size is larger than the first spray size.

A method of producing bi-modal particles includes the steps of igniting a first precursor gas using a primary burner thereby producing a first plurality of particles of a first size, fluidly transporting the first plurality of particles down a particle tube, igniting a second precursor gas using a secondary burner thereby producing a second plurality of particles of a second size, flowing the second plurality of particles into the first plurality of particles, and capturing the first and second plurality of particles.

Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.

A method of producing bi-modal particles includes the steps of igniting a first precursor gas using a primary burner thereby producing a first plurality of particles of a first size, fluidly transporting the first plurality of particles down a particle tube, igniting a second precursor gas using a secondary burner thereby producing a second plurality of particles of a second size, flowing the second plurality of particles into the first plurality of particles, and capturing the first and second plurality of particles.

A process for producing a fluorinated quartz glass is described, including providing an SiO.sub.2 soot body; reacting the SiO.sub.2 soot body with a fluorinating agent having a boiling point of greater than or equal to −10° C. to obtain a fluorinated SiO.sub.2 soot body; and vitrifying the fluorinated SiO.sub.2 soot body.

A process for the production of a fluorinated quartz glass including the steps of generating SiO.sub.2 particles in a synthesis burner; depositing the resulting SiO.sub.2 particles into a body; and vitrifying the resulting body, wherein a fluorinating agent having a boiling point greater than or equal to −10° C. is supplied to the synthesis burner.

Described is a process for the production of synthetic fused silica in which the deposition surface is located for a period of at least 50% of the build-up time of the soot body at a burner distance in which the horizontally integrated luminous intensity of the flame of the burner used in the targetless state is still at least ⅔ of the maximum horizontally integrated luminous intensity of the flame.

Described is a method of producing synthetic fused silica in which the synthetic flame used in the method has a ratio of the Full Width at Half Maximum (FWHM.sub.vert) vertical luminous intensity to the Full Width at Half Maximum (FWHM.sub.hori) horizontal luminous intensity greater than 10 in a targetless state, the luminous intensities being measured in candela/mm.sup.2.

Described is a process for the production of synthetic fused silica in which the feedstock vapor is reacted from an organosilicon starting compound and any combustible burner auxiliary gases at an air number in the burner of less than or equal to 1.00. Furthermore, one embodiment relates to a corresponding apparatus.

When organic siloxane in a liquid state is used as a raw material for glass particles, the formation of polymerized substances is suppressed when the raw material is vaporized in a vaporizer. In the manufacturing method of porous glass base material according to the present invention, the liquid organic siloxane, which is the raw material, is mixed with a carrier gas in the vaporizer, vaporized by the heat generated from the inner wall of the vaporizer heated by a heater unit, and supplied to the burner as a gas raw material. The porous glass base material is manufactured by depositing the glass particles generated by the combustion of the gas raw material on the starting material. The heating output of the heater unit is controlled so that the maximum temperature of the inner wall of the vaporizer is 230° C. or lower.