C03B25/093

METHODS FOR THERMALLY TREATING GLASS ARTICLES

According to one embodiment, a method for thermally treating glass articles may include holding a glass article at a treatment temperature equal to an annealing temperature of the glass article =15° C. for a holding time greater than or equal to 5 minutes. Thereafter, the glass article may be cooled from the treatment temperature through a strain point of the glass article at a first cooling rate CR1 less than 0° C./min and greater than −20° C./min such that a density of the glass article is greater than or equal to 0.003 g/cc after cooling. The glass article is subsequently cooled from below the strain point at a second cooling rate CR.sub.2, wherein |CR.sub.2|>|CR.sub.1|.

METHODS FOR THERMALLY TREATING GLASS ARTICLES

According to one embodiment, a method for thermally treating glass articles may include holding a glass article at a treatment temperature equal to an annealing temperature of the glass article =15° C. for a holding time greater than or equal to 5 minutes. Thereafter, the glass article may be cooled from the treatment temperature through a strain point of the glass article at a first cooling rate CR1 less than 0° C./min and greater than −20° C./min such that a density of the glass article is greater than or equal to 0.003 g/cc after cooling. The glass article is subsequently cooled from below the strain point at a second cooling rate CR.sub.2, wherein |CR.sub.2|>|CR.sub.1|.

Workpiece conveyance apparatus, semiconductor manufacturing apparatus, and workpiece conveyance method

A workpiece conveyance apparatus having: a conveyance path on which the workpiece moves; a gas flotation section that gas-floats the workpiece over the conveyance path; a movable holding section that holds the workpiece to move on the conveyance path along with the workpiece; and a treatment region conveyance path that is located on the conveyance path, and has a treatment region where predetermined treatment for the workpiece is performed, wherein the movable holding section has at least two or more holding sections along a movement direction of the conveyance path, each of the holding sections is capable of switching between release of holding and holding for the workpiece during movement of the workpiece, operation for releasing holding of the workpiece by the holding section on the treatment region conveyance path, and holding the workpiece on the conveyance path other than the treatment region conveyance path.

Workpiece conveyance apparatus, semiconductor manufacturing apparatus, and workpiece conveyance method

A workpiece conveyance apparatus having: a conveyance path on which the workpiece moves; a gas flotation section that gas-floats the workpiece over the conveyance path; a movable holding section that holds the workpiece to move on the conveyance path along with the workpiece; and a treatment region conveyance path that is located on the conveyance path, and has a treatment region where predetermined treatment for the workpiece is performed, wherein the movable holding section has at least two or more holding sections along a movement direction of the conveyance path, each of the holding sections is capable of switching between release of holding and holding for the workpiece during movement of the workpiece, operation for releasing holding of the workpiece by the holding section on the treatment region conveyance path, and holding the workpiece on the conveyance path other than the treatment region conveyance path.

APPARATUS AND METHOD FOR PROCESSING A GLASS SUBSTRATE
20220332626 · 2022-10-20 ·

Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supporting and transporting softened glass. The method includes placing the glass in proximity to a gas bearing device having a support surface with a plurality of outlet ports disposed therein. Some embodiments are directed to a glass processing apparatus comprising an air table configured to continuously transport and support a stream of glass and a plurality of modular devices supported by a support structure and disposed above the air table. Some embodiments are directed to a method for flattening viscous glass using a two-sided gas bearing device or a one-sided gas bearing device.

APPARATUS AND METHOD FOR PROCESSING A GLASS SUBSTRATE
20220332626 · 2022-10-20 ·

Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supporting and transporting softened glass. The method includes placing the glass in proximity to a gas bearing device having a support surface with a plurality of outlet ports disposed therein. Some embodiments are directed to a glass processing apparatus comprising an air table configured to continuously transport and support a stream of glass and a plurality of modular devices supported by a support structure and disposed above the air table. Some embodiments are directed to a method for flattening viscous glass using a two-sided gas bearing device or a one-sided gas bearing device.

Apparatus and method for processing a glass substrate

Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supporting and transporting softened glass. The method includes placing the glass in proximity to a gas bearing device having a support surface with a plurality of outlet ports disposed therein. Some embodiments are directed to a glass processing apparatus comprising an air table configured to continuously transport and support a stream of glass and a plurality of modular devices supported by a support structure and disposed above the air table. Some embodiments are directed to a method for flattening viscous glass using a two-sided gas bearing device or a one-sided gas bearing device.

Apparatus and method for processing a glass substrate

Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supporting and transporting softened glass. The method includes placing the glass in proximity to a gas bearing device having a support surface with a plurality of outlet ports disposed therein. Some embodiments are directed to a glass processing apparatus comprising an air table configured to continuously transport and support a stream of glass and a plurality of modular devices supported by a support structure and disposed above the air table. Some embodiments are directed to a method for flattening viscous glass using a two-sided gas bearing device or a one-sided gas bearing device.

APPARATUS AND METHOD FOR PROCESSING A GLASS SUBSTRATE
20210292221 · 2021-09-23 ·

Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supporting and transporting softened glass. The method includes placing the glass in proximity to a gas bearing device having a support surface with a plurality of outlet ports disposed therein. Some embodiments are directed to a glass processing apparatus comprising an air table configured to continuously transport and support a stream of glass and a plurality of modular devices supported by a support structure and disposed above the air table. Some embodiments are directed to a method for flattening viscous glass using a two-sided gas bearing device or a one-sided gas bearing device.

APPARATUS AND METHOD FOR PROCESSING A GLASS SUBSTRATE
20210292221 · 2021-09-23 ·

Disclosed are apparatuses and methods for non-contact processing a substrate, for example a glass substrate, overtop a gas layer. The support apparatus includes a plurality of gas bearings positioned on a pressure box supplied with a pressurized gas. Some embodiments are directed to a method of supporting and transporting softened glass. The method includes placing the glass in proximity to a gas bearing device having a support surface with a plurality of outlet ports disposed therein. Some embodiments are directed to a glass processing apparatus comprising an air table configured to continuously transport and support a stream of glass and a plurality of modular devices supported by a support structure and disposed above the air table. Some embodiments are directed to a method for flattening viscous glass using a two-sided gas bearing device or a one-sided gas bearing device.