Patent classifications
C03C2201/24
Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the component
An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×10.sup.16 to 1.0×10.sup.18 molecules/cm.sup.3, an SiH group content of less than 2×10.sup.17 molecules/cm.sup.3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×10.sup.9 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm.sup.2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M.sub.193 nm when measured using the applied wavelength of 193 nm and a second measured value M.sub.633 nm when measured using a measured wavelength of 633 nm. The ratio M.sub.193 nm/M.sub.633 nm is less than 1.7.
LOW ATTENUATION FIBER WITH STRESS RELIEVING LAYER AND A METHOD OF MAKING SUCH
A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index Δ.sub.1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index Δ.sub.2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650° C. of the second outer cladding minus the viscosity at 1650° C. of the first outer cladding is greater than 0.1e.sup.7 Poise, and Δ.sub.1MAX>Δ.sub.2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index Δ.sub.3MAX, and Δ.sub.3MAX>Δ.sub.2MIN.
Color-stable, antimicrobial, porous glass powder and process for producing such a powder at high temperatures and use thereof
A color-stable, antimicrobial glass powder obtained by partial ion exchange at a temperature of 300° C. to 350° C. and an exchange time of 1 to 120 minutes, is formed of a mixture of porous glass particles having micropores and macropores made of borosilicate glass continuously foamed by extrusion having a Fe.sub.2O.sub.3 content <0.2 wt %, in which the obtained glass foam is subsequently comminuted by dry grinding to average particle sizes of 1.0 to 8.0 μm. The mixture includes color stabilizers containing 0.1% to 0.2% of ammonium ions and antimicrobial metal ions from dissolved metal salts, wherein the metal ions may be silver and/or zinc and/or copper ions. A method for the production of a color-stable, antimicrobial glass powder and applications for using the color-stable, antimicrobial glass powder are also provided.
Glass member
The present invention relates to a glass member in which an inorganic phosphor is dispersed in a glass matrix, in which the glass member includes an SiO.sub.2—B.sub.2O.sub.3 based glass as the glass matrix, and the SiO.sub.2—B.sub.2O.sub.3 based glass includes SiO.sub.2 as a main component thereof, and includes, based on a total amount of the SiO.sub.2—B.sub.2O.sub.3 based glass: Al.sub.2O.sub.3 in an amount of 4 to 10 wt %; and MgO and ZnO in a total amount of 0.1 to 0.7 wt %.
GLASS MEMBER
The present invention relates to a glass member in which an inorganic phosphor is dispersed in a glass matrix, in which the glass member includes an SiO.sub.2B.sub.2O.sub.3 based glass as the glass matrix, and the SiO.sub.2B.sub.2O.sub.3 based glass includes SiO.sub.2 as a main component thereof, and includes, based on a total amount of the SiO.sub.2B.sub.2O.sub.3 based glass:Al.sub.2O.sub.3 in an amount of 4 to 10 wt %; and MgO and ZnO in a total amount of 0.1 to 0.7 wt %.
COLOR-STABLE, ANTIMICROBIAL, POROUS GLASS POWDER AND PROCESS FOR PRODUCING SUCH A POWDER AT HIGH TEMPERATURES AND USE THEREOF
A color-stable, antimicrobial glass powder obtained by partial ion exchange at a temperature of 300 C. to 350 C. and an exchange time of 1 to 120 minutes, is formed of a mixture of porous glass particles having micropores and macropores made of borosilicate glass continuously foamed by extrusion having a Fe.sub.2O.sub.3 content <0.2 wt %, in which the obtained glass foam is subsequently comminuted by dry grinding to average particle sizes of 1.0 to 8.0 m. The mixture includes color stabilizers containing 0.1% to 0.2% of ammonium ions and antimicrobial metal ions from dissolved metal salts, wherein the metal ions may be silver and/or zinc and/or copper ions. A method for the production of a color-stable, antimicrobial glass powder and applications for using the color-stable, antimicrobial glass powder are also provided.
OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT
An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.110.sup.16 to 1.010.sup.18 molecules/cm.sup.3, an SiH group content of less than 210.sup.17 molecules/cm.sup.3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070 C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 510.sup.9 pulses with a pulse width of 125 ns and a respective energy density of 500 J/cm.sup.2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M.sub.193 nm when measured using the applied wavelength of 193 nm and a second measured value M.sub.633 nm when measured using a measured wavelength of 633 nm. The ratio M.sub.193 nm/M.sub.633 nm is less than 1.7.
Low attenuation fiber with stress relieving layer and a method of making such
A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index .sub.1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index .sub.2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650 C. of the second outer cladding minus the viscosity at 1650 C. of the first outer cladding is greater than 0.1e.sup.7 Poise, and .sub.1MAX>.sub.2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index .sub.3MAX, and .sub.3MAX>.sub.2MIN.
Low attenuation fiber with stress relieving layer and a method of making such
A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index .sub.1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index .sub.2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650 C. of the second outer cladding minus the viscosity at 1650 C. of the first outer cladding is greater than 0.1e.sup.7 Poise, and .sub.1MAX>.sub.2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index .sub.3MAX, and .sub.3MAX>.sub.2MIN.
SURFACE NITRIDED ALKALI-FREE GLASSES CROSS-REFERENCE TO RELATED APPLICATIONS
Alkali-free glasses are disclosed having (in weight %) 50SiO.sub.280%, 2Al.sub.2O.sub.317%, 8B.sub.2O.sub.336%, and greater than or equal to 2% and less than or equal to 25% of at least one of CaO, MgO, BaO, SrO or ZnO. The alkali-free glasses can have a surface layer with greater than 0.2 weight % N. Such alkali-free glasses are achieved by nitriding processes and exhibit increased strength, scratch resistance and chemical durability.