A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

To provide a sintered body with improved impact resistance due to impact absorption through plastic deformation before brittle fracture for an impact exceeding the fracture resistance of the sintered body, and/or a method for producing the sintered body.

A sintered body including: zirconia containing a stabilizer; and a region in which an impact mark is formed when an impact force is applied.

A cubic boron nitride sintered material tool contains a plurality of cBN grains. cBN grains located on a surface of the cutting edge contain a cubic boron nitride phase, and a hexagonal boron nitride phase. When a ratio I.sub.π*/I.sub.σ* between an intensity of a π* peak derived from a π bond of hBN in the hexagonal boron nitride phase and an intensity of a σ* peak derived from a σ bond of hBN in the hexagonal boron nitride phase and a σ bond of cBN in the cubic boron nitride phase is determined by measuring an energy loss associated with excitation of K-shell electrons of boron, the ratio I.sub.π*/I.sub.σ* of the cBN grain on the surface of the cutting edge is 0.1 to 2, and the ratio I.sub.π*/I.sub.σ* of the cBN grain at a depth position of 5 μm from the surface of the cutting edge is 0.001 to 0.1.

A gas nozzle having a fired surface excellent in particle reduction effect is provided. The gas nozzle 1 is a columnar gas nozzle made of sintered ceramics, provided with at least one through-hole 2 through which gas flows. The entire inner surface 2a of the through-hole 2 and the end face 1A on which outlet 2b of the through-hole 2 is provided are both fired surfaces. The inner surface 2a of the through-hole 2 has a first region A in the vicinity of the outlet 2b and a second region B which is located at a further position than the first region A. The average crystal grain size in the first region A is formed to be smaller than the average crystal grain size in the second region B.

A refractory article including a body having central opening extending through at least a portion of the body, the central opening having a receiving surface having a convex curvature. In an embodiment, the body can include a coupling protrusion extending from a portion of an upper surface of the body and a coupling depression on a portion of a bottom surface of the body.

A method of forming a ceramic matrix composite component with cooling channels includes embedding a plurality of wires into a preform structure, densifying the preform structure with embedded wires, and removing the plurality of wires to create a plurality of corresponding channels within the densified structure.

A module and a process for forming a monolithic substantially closed-porosity silicon carbide fluidic module having a tortuous fluid passage extending through the module, the tortuous fluid passage having an interior surface, the interior surface having a surface roughness in the range of from 0.1 to 10 μm Ra. The process includes positioning a positive fluid passage mold within a volume of silicon carbide powder, the powder coated with a binder; pressing the volume of silicon carbide powder with the mold inside to form a pressed body; heating the pressed body to remove the mold; and sintering the pressed body.

A method for making a ceramic matrix composite component includes densifying a fibrous preform of the component with a ceramic matrix to form an intermediate component; infiltrating a hole in the intermediate component with an infiltrate material comprising a solid and a metallic alloy whose reaction forms a carbide, silicide, boride or combination thereof, heating the infiltrate material to a temperature in excess of a melting point of the metallic alloy; and sequentially cooling regions of the hole starting from an interior end of the hole to the outer surface of the intermediate component to form a solidified through-thickness reinforcement element. The hole extends in a through-thickness direction and is open to an exterior surface of the intermediate component.

The present invention relates to a method for manufacturing a silicon nitride substrate and, more specifically, comprises the steps of: forming a slurry by mixing silicon nitride powder, a ceramic additive, and a solvent; molding the slurry to form sheets; sandwiching at least one of the sheets between a lower plate and an upper plate to form a stacked structure; degreasing the stacked structure; and sintering the stacked structure. At least one of the lower plate and the upper plate comprises a plurality of protrusions provided on one surface thereof, and the protrusions extend in parallel to each other in one direction.

The present invention discloses a guide pin, which comprises a base support layer (1) and a protective layer (2). The base support layer (1) is a rod-shaped structure. The protective layer (2) tightly wraps the surface of the base support layer (1). A manufacturing method for the guide pin made of various materials is also disclosed. The guide pin manufactured by the method of the present invention is not prone to bending or deformation and has good corrosion resistance and acid/alkaline resistance properties; it is wear resistant and has of extended service life; it is easy to be processed and is low in cost.