C04B35/505

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS FOR SEMICONDUCTOR CHAMBER APPLICATIONS

Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.

Phase gradient nanocomposite window fabrication and method of fabricating durable optical windows
11579338 · 2023-02-14 · ·

A unitary radome layer assembly is provided and includes a first nanocomposite formulation and a second nanocomposite formulation. The first and second nanocomposite formulations are provided together in a unitary radome layer with respective distribution gradients.

Phase gradient nanocomposite window fabrication and method of fabricating durable optical windows
11579338 · 2023-02-14 · ·

A unitary radome layer assembly is provided and includes a first nanocomposite formulation and a second nanocomposite formulation. The first and second nanocomposite formulations are provided together in a unitary radome layer with respective distribution gradients.

Plasma spray coating design using phase and stress control

An article includes a body having a plasma-sprayed ceramic coating on a surface thereof. The body can be formed of at one least one of the following materials: Al, Al.sub.2O.sub.3, AlN, Y.sub.2O.sub.3, YSZ, or SiC. The plasma-sprayed ceramic coating can include at least one of Y.sub.2O.sub.3, Y.sub.4Al.sub.2O.sub.9, Y.sub.3Al.sub.5O.sub.12 or a solid-solution of Y.sub.2O.sub.3 mixed with at least one of ZrO.sub.2, Al.sub.2O.sub.3, HfO.sub.2, Er.sub.2O.sub.3, Nd.sub.2O.sub.3, Nb.sub.2O.sub.5, CeO.sub.2, Sm.sub.2O.sub.3 or Yb.sub.2O.sub.3. The plasma-sprayed ceramic coating can further include splats.

Plasma spray coating design using phase and stress control

An article includes a body having a plasma-sprayed ceramic coating on a surface thereof. The body can be formed of at one least one of the following materials: Al, Al.sub.2O.sub.3, AlN, Y.sub.2O.sub.3, YSZ, or SiC. The plasma-sprayed ceramic coating can include at least one of Y.sub.2O.sub.3, Y.sub.4Al.sub.2O.sub.9, Y.sub.3Al.sub.5O.sub.12 or a solid-solution of Y.sub.2O.sub.3 mixed with at least one of ZrO.sub.2, Al.sub.2O.sub.3, HfO.sub.2, Er.sub.2O.sub.3, Nd.sub.2O.sub.3, Nb.sub.2O.sub.5, CeO.sub.2, Sm.sub.2O.sub.3 or Yb.sub.2O.sub.3. The plasma-sprayed ceramic coating can further include splats.

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

BINDER FOR INJECTION MOULDING COMPOSITION

A binder for an injection moulding composition, the binder includes, in percentage by mass and for a total of 100%: 35% to 60% of a component (a), or polymer base, made of a polymer or a mixture of polymers, each of the polymer being non-amphiphilic and having a mass average molar mass greater than or equal to 5,000 g/mol, 30% to 55% of a component (b), or wax, made of a polymer or a mixture of polymers, each of the polymer being non-amphiphilic and having a mass average molar mass less than 5,000 g/mol, and less than 10% of an amphiphilic component (c), or surfactant, and less than 10% of other components (d). The polymer base comprising 2% to 15% of a styrene-ethylene-butylene-styrene copolymer (SEBS), in percentage by mass based on the mass of the binder.

Ion beam sputtering with ion assisted deposition for coatings on chamber components

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.

Ion beam sputtering with ion assisted deposition for coatings on chamber components

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.