A resist composition comprising a base polymer and a sulfonium or iodonium salt of sulfonic acid containing a morpholino group offers dimensional stability on PPD and a satisfactory resolution.

Materials and methods for preparing reactive lignin and for preparing a bio-based adhesive are described herein.

The invention provides a novel hydrocarbon-containing carboxylic acid, hydrocarbon-containing sulfonic acid, hydrocarbon-containing sulfuric acid ester, or a salt thereof, and a surfactant. Each of them is a compound represented by the following formula (1):

CR.sup.1R.sup.2R.sup.4CR.sup.3R.sup.5X-A

wherein R.sup.1 to R.sup.5 are each H or a monovalent substituent; at least one of R.sup.1 or R.sup.3 is a group represented by the formula: YR.sup.6; at least one of R.sup.2 or R.sup.5 is a group represented by the formula: X-A or a group represented by the formula: YR.sup.6; and As at the respective appearances are the same as or different from each other, and are each COOM, SO.sub.3M, or OSO.sub.3M.

The invention provides a novel hydrocarbon-containing carboxylic acid, hydrocarbon-containing sulfonic acid, hydrocarbon-containing sulfuric acid ester, or a salt thereof, and a surfactant. Each of them is a compound represented by the following formula (1):

CR.sup.1R.sup.2R.sup.4CR.sup.3R.sup.5X-A

wherein R.sup.1 to R.sup.5 are each H or a monovalent substituent; at least one of R.sup.1 or R.sup.3 is a group represented by the formula: YR.sup.6; at least one of R.sup.2 or R.sup.5 is a group represented by the formula: X-A or a group represented by the formula: YR.sup.6; and As at the respective appearances are the same as or different from each other, and are each COOM, SO.sub.3M, or OSO.sub.3M.

Materials and methods for preparing reactive lignin and for preparing a bio-based adhesive are described herein.

Materials and methods for preparing reactive lignin and for preparing a bio-based adhesive are described herein.

A negative resist composition is provided comprising a base polymer and an acid generator in the form of a sulfonium salt consisting of a sulfonate anion having a maleimide group and a cation having a polymerizable double bond. The resist composition adapted for organic solvent development exhibits a high resolution and improved LWR or CDU.

A negative resist composition is provided comprising a base polymer and an acid generator in the form of a sulfonium salt consisting of a sulfonate anion having a maleimide group and a cation having a polymerizable double bond. The resist composition adapted for organic solvent development exhibits a high resolution and improved LWR or CDU.

The hydrophilic oil repellent includes one or more types of nitrogen-containing fluorine-based compounds. The nitrogen-containing fluorine-based compound includes any one hydrophilicity imparting group selected from the group consisting of anion type hydrophilicity imparting groups, cation type hydrophilicity imparting groups, and amphoteric type hydrophilicity imparting groups in the molecule.

The hydrophilic oil repellent includes one or more types of nitrogen-containing fluorine-based compounds. The nitrogen-containing fluorine-based compound includes any one hydrophilicity imparting group selected from the group consisting of anion type hydrophilicity imparting groups, cation type hydrophilicity imparting groups, and amphoteric type hydrophilicity imparting groups in the molecule.