Provided is a production method for producing an aromatic alkoxysilane containing a hexafluoropropanol group (C(CF.sub.3).sub.2OH; referred to as HFIP group) from an inexpensive starting raw material with a high reaction conversion rate and selectivity. As shown in the following scheme, the production method includes: a first step of reacting an aromatic halosilane with hexafluoroacetone in the presence of a Lewis acid catalyst, thereby obtaining a HFIP group-containing aromatic halosilane; and a second step of forming the HFIP group-containing aromatic alkoxysilane by reacting the HFIP group-containing aromatic halosilane with an alcohol.

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