Disclosed is a method of preparing a rare-earth alkyl phosphate solution, the method including step (a) of preparing an alkyl phosphate amine salt solution by reacting an organic amine with an alkyl phosphate in a first solvent; step (b) of preparing a rare-earth metal salt solution by reacting a rare-earth metal oxide with an acid in the second solvent; and step (c) of mixing and reacting the alkyl phosphate amine salt solution with the rare-earth metal salt solution.

Disclosed is a method of preparing a rare-earth alkyl phosphate solution, the method including step (a) of preparing an alkyl phosphate amine salt solution by reacting an organic amine with an alkyl phosphate in a first solvent; step (b) of preparing a rare-earth metal salt solution by reacting a rare-earth metal oxide with an acid in the second solvent; and step (c) of mixing and reacting the alkyl phosphate amine salt solution with the rare-earth metal salt solution.

The disclosed subject matter relates compounds of structure (I), and polymers of structure (II) having a polydispersity ranging from 1 to about 1.1, compositions comprising said polymers and a spin casting solvent, the process of forming a pinning layer selectively on metal with said composition and the process of using said pinning layers to affect chemoepitaxy directed self-assembly of an overlying block copolymer, and the subsequent process of pattern transfer of this self-assembled layer into a substrate by etching. ##STR00001##

The disclosed subject matter relates compounds of structure (I), and polymers of structure (II) having a polydispersity ranging from 1 to about 1.1, compositions comprising said polymers and a spin casting solvent, the process of forming a pinning layer selectively on metal with said composition and the process of using said pinning layers to affect chemoepitaxy directed self-assembly of an overlying block copolymer, and the subsequent process of pattern transfer of this self-assembled layer into a substrate by etching.

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