A hard film formed on/above a substrate has a composition represented by the following formula (1): Cr.sub.1−aMg.sub.a(B.sub.xC.sub.yN.sub.1−x−y) (1). In the formula (1), a is the atomic ratio of Mg, x is the atomic ratio of B, and y is the atomic ratio of C; and a, x, and y satisfy the following relationships: 0.05≦a≦0.30, 0≦x≦0.20, and 0≦y≦0.30.

Methods and apparatus reduce defects in substrates processed in a physical vapor (PVD) chamber. In some embodiments, a method for cleaning a process kit disposed in an inner volume of a process chamber includes positioning a non-sputtering shutter disk on a substrate support of the PVD chamber; energizing an oxygen-containing cleaning gas disposed in the inner volume of the PVD chamber to create a plasma reactive with carbon-based materials; and heating the process kit having a carbon-based material adhered thereto while exposed to the plasma to remove at least a portion of the carbon-based material adhered to the process kit.

A method of producing a film of carbon nitride material, including the steps of providing a precursor of the carbon nitride material in a reacting vessel and a substrate substantially above the precursor of the carbon nitride material; heating the reacting vessel, the precursor of the carbon nitride material and the substrate at the first predetermined temperature; and quenching the reacting vessel to reach the second predetermined temperature; wherein the film of carbon nitride material is formed on a surface of the substrate during the quenching of the reacting vessel.

An electrochemical electrode and method for making same that provides enhanced characteristics for use in biosensors, such as blood glucose sensors. The electrode comprises a substrate, a conductive layer deposited on the substrate, and a resistive material layer deposited on the conductive layer. The conductive layer comprises nickel and chromium, and the resistive material layer comprises carbon and a carbon-nitrogen species.

In an amorphous carbon film of a sliding member, provided that a number of nitrogen atoms each singly bonded to three carbon atoms is A, and a number of nitrogen atoms each singly and doubly bonded to two carbon atoms, respectively, is B, a value A/B of the amorphous carbon film obtained through X-ray photoelectron spectroscopy analysis is 10 to 18. The method includes irradiating the surface of the substrate with nitrogen ion beams and irradiating a carbon target with electron beams, thereby forming an amorphous carbon film on the surface of the substrate while vapor-depositing a part of the carbon target onto the surface of the substrate. The output of the electron beams that irradiate the carbon target is 30 to 50 W.

A method of producing a film of carbon nitride material, including the steps of providing a precursor of the carbon nitride material in a reacting vessel and a substrate substantially above the precursor of the carbon nitride material; heating the reacting vessel, the precursor of the carbon nitride material and the substrate at the first predetermined temperature; and quenching the reacting vessel to reach the second predetermined temperature; wherein the film of carbon nitride material is formed on a surface of the substrate during the quenching of the reacting vessel.

A coated cutting tool comprises a substrate and a coating layer and the coating layer comprises a first laminate structure and a second laminate structure and each of the first laminate structure and the second laminate structure is laminated in an alternating manner and the number of laminations is three or more and one compound layer and other compound layer of the compound layers of two kinds in the each of the first laminate structure and the second laminate structure has a specific composition and the first laminate structure and each of the second laminate structure satisfies a specific condition and an average thickness of each of the layers constituting the first laminate structure and the second laminate structure and an average thickness of the coating layer is respectively a specific one.

A guiding member, having a body provided with a bore for mounting a mobile element is presented. The body consists of a metallic material. The bore has a surface layer treated against jamming over a diffusion depth of less than or equal to 0.6 mm. The surface layer has a hardness of greater than or equal to 500 Hv1 over a depth of between 5 and 50 ?m.

A coated cutting tool comprises a substrate and a coating layer and the coating layer comprises a first laminate structure and a second laminate structure and each of the first laminate structure and the second laminate structure is laminated in an alternating manner and the number of laminations is three or more and one compound layer and other compound layer of the compound layers of two kinds in the each of the first laminate structure and the second laminate structure has a specific composition and the first laminate structure and each of the second laminate structure satisfies a specific condition and an average thickness of each of the layers constituting the first laminate structure and the second laminate structure and an average thickness of the coating layer is respectively a specific one.

In an amorphous carbon film of a sliding member, provided that a number of nitrogen atoms each singly bonded to three carbon atoms is A, and a number of nitrogen atoms each singly and doubly bonded to two carbon atoms, respectively, is B, a value A/B of the amorphous carbon film obtained through X-ray photoelectron spectroscopy analysis is 10 to 18. The method includes irradiating the surface of the substrate with nitrogen ion beams and irradiating a carbon target with electron beams, thereby forming an amorphous carbon film on the surface of the substrate while vapor-depositing a part of the carbon target onto the surface of the substrate. The output of the electron beams that irradiate the carbon target is 30 to 50 W.