A cutting tool includes a substrate; and a coating film, wherein the coating film includes a multilayer structure layer having first unit layer(s) and second unit layer(s), the first unit layer(s) and the second unit layer(s) are alternately layered, under a condition X-ray diffraction intensities of different planes in the multilayer structure layer are respectively represented by I.sub.(200), I.sub.(111), and I.sub.(220), the following formula 0.6≤I.sub.(200)/{I.sub.(200)+I.sub.(111)+I.sub.(220)}, the first unit layer(s) has a NaCl-like structure in which an interplanar spacing d.sub.1c in a c-axis direction is larger than an interplanar spacing d.sub.1a in an a-axis direction, the second unit layer(s) has a NaCl-like structure in which an interplanar spacing d.sub.2c in the c-axis direction is smaller than an interplanar spacing d.sub.2a in the a-axis direction, and the following formulas are satisfied as well 1≤d.sub.1a/d.sub.2a≤1.02, 1.01≤d.sub.1c/d.sub.2c≤1.05, and d.sub.1a/d.sub.2a<d.sub.1c/d.sub.2c.

An object of the invention is to provide a coated cutting tool whose tool life can be extended by having excellent wear resistance and fracture resistance. The coated cutting tool includes: a substrate; and a coating layer formed on a surface of the substrate, in which the coating layer includes a lower layer, an intermediate layer, and an upper layer in this order from a substrate side to a surface side of the coating layer, the lower layer includes one or more Ti compound layers formed of a specific Ti compound, the intermediate layer contains TiCNO, TiCO, or TiAlCNO, the upper layer contains α-type Al.sub.2O.sub.3, an average thickness of the lower layer is 2.0 μm or more and 8.0 μm or less, an average thickness of the intermediate layer is 0.5 μm or more and 2.0 μm or less and is 10% or more and 20% or less of an average thickness of the entire coating layer, an average thickness of the upper layer is 0.8 μm or more and 6.0 μm or less, and in the intermediate layer, a ratio of a length of CSL grain boundaries and a ratio of a length of Σ3 grain boundaries are in specific ranges.

An object of the invention is to provide a coated cutting tool whose tool life can be extended by having excellent wear resistance and fracture resistance. The coated cutting tool includes: a substrate; and a coating layer formed on a surface of the substrate, in which the coating layer includes a lower layer, an intermediate layer, and an upper layer in this order from a substrate side to a surface side of the coating layer, the lower layer includes one or more Ti compound layers formed of a specific Ti compound, the intermediate layer contains TiCNO, TiCO, or TiAlCNO, the upper layer contains α-type Al.sub.2O.sub.3, an average thickness of the lower layer is 2.0 μm or more and 8.0 μm or less, an average thickness of the intermediate layer is 0.5 μm or more and 2.0 μm or less and is 10% or more and 20% or less of an average thickness of the entire coating layer, an average thickness of the upper layer is 0.8 μm or more and 6.0 μm or less, and in the intermediate layer, a ratio of a length of CSL grain boundaries and a ratio of a length of Σ3 grain boundaries are in specific ranges.

A coated article including an article having a surface; an oxidation resistant bond coat layer deposited on the surface, the oxidation resistant bond coat layer comprising a metal silicide phase, a crystalline ceramic phase and an amorphous ceramic phase, wherein the metal silicide phase has an aspect ratio greater than 1:1 but less than 50:1.

Systems, methods, and apparatus for encapsulating objects like that of microelectronic components and batteries. The system includes three successive layers that include a first covering layer composed of an electrically insulating material deposited by atomic layer deposition, which at least partly covers the object, a second covering layer that includes parylene and/or polyimide, and which is disposed on the first covering layer, and a third covering layer deposited on the second covering layer in such a way as to protect the second encapsulation layer, namely, with respect to oxygen, and thereby increase the service life of the object.

An object, such as a sensor for an immersion lithographic apparatus, has an outer layer which comes in contact with immersion liquid and wherein the outer layer has a composition including a rare earth element. There is also provided an immersion lithographic apparatus having such an object and a method for manufacturing such an object.

A tool die for forming a green ceramic body. The tool die has a wear resistant coating that is deposited on a substrate and has an outer or free surface having a morphology that provides a mean roughness in a range from about 0.03 μm up to about 0.8 μm Rq. In one embodiment, the wear resistant coating has multiple alternating layers of fine grained and coarse grained materials. Methods of making the tool die and wear resistant coating are also provided.

A laminate that improves barrier properties of an atomic layer deposition film in spite of use of a substrate made of a polymer material, and provides a gas barrier film and a method of producing the same. The laminate includes: a substrate made a polymer material; an undercoat layer disposed on at least part of a surface of the substrate and made up of an inorganic material containing Ta; and an atomic layer deposition film disposed so as to cover a surface of the undercoat layer.

A coated tool includes a substrate and a coating layer disposed on a surface of the substrate. The coating layer includes a first stack structure (3) and a second stack structure (4). The first stack structure has two or more kinds of layers with different compositions periodically stacked with an average layer thickness of 60-500 nm. The second stack structure has two or more kinds of layers with different compositions periodically stacked with an average layer thickness of 2 nm to less than 60 nm. The layers in each stack structure include at least one selected from the group consisting of metal elements Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Sr, Y, Sn and Bi; and compounds including at least one of these metal elements and at least one non-metal element selected from carbon, nitrogen, oxygen and boron.

A bolt of the present invention has a composition comprising: 0.50 mass % or greater and 0.65 mass % or less of carbon (C), 1.5 mass % or greater and 2.5 mass % or less of silicon (Si), 1.0 mass % or greater and 2.0 mass % or less of chromium (Cr), 0.2 mass % or greater and 1.0 mass % or less of manganese (Mn), 1.5 mass % or greater and 5.0 mass % or less of molybdenum (Mo), wherein a total amount of phosphorous (P) and sulfur (S) as impurities is 0.03 mass % or less, the remaining is iron (Fe), and the bolt comprises an iron based oxide film with a film thickness of 3 μm or greater and 20 μm or less on the surface thereof. The bolt has excellent delayed fracture resistance and reliably provides a fastening axial force.