Patent classifications
C23C28/36
ta-C based coatings with improved hardness
A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.
TITANIUM CONTACT FORMATION
The formation of titanium contacts to silicon germanium (SiGe) comprises the formation of a titanium silicide layer in which the silicon for the titanium silicide layer is provided by flowing silane (disilane, trisilane, etc.) over a titanium layer at an elevated temperature. The titanium silicide layer can help limit the amount of titanium and germanium interdiffusion that can occur across the titanium silicide-silicon germanium interface, which can reduce (or eliminate) the formation of voids in the SiGe layer during subsequent anneal and other high-temperature processes. The surface of the SiGe layer upon which the titanium layer is formed can also be preamorphized via boron and germanium implantation to further improve the robustness of the SiGe layer against microvoid development. The resulting titanium contacts are thermally stable in that their resistance remains substantially unchanged after being subjected to downstream annealing and high-temperature processing processes.
THERMALLY DISSIPATIVE ARTICLE AND METHOD OF FORMING A THERMALLY DISSIPATIVE ARTICLE
A thermally dissipative article and a method of forming a thermally dissipative article are disclosed. The thermally dissipative article includes a component, a porous material formed in a layer on the component. The method of forming a thermally dissipative article includes providing a metal powder mixture and a soluble particulate mixture which forms a porous coating upon sintering and immersion in a solvent to remove the soluble particulate.
METHOD OF PRODUCING BLADES OR BLADE ARRANGEMENTS OF A TURBOMACHINE WITH EROSION PROTECTION LAYERS AND CORRESPONDINGLY PRODUCED COMPONENT
The present invention relates to a method for producing a blade or blade arrangement of a turbomachine, which features the following steps: producing a blade (4) from at least one blade material, machining the blade in at least one region of the blade by a surface machining process, cleaning the surface of the blade depositing an erosion protection coating (10) of at least two layers of different hardness by physical vapor deposition in the at least one region, machining the erosion protection coating (10) by a coating smoothing process in order to establish a defined surface roughness.
Furthermore, the invention relates to correspondingly produced blades or blade arrangements.
Molybdenum monoxide layers, and production thereof using PVD
The invention relates to a coating comprising at least one molybdenum-containing layer having molybdenum oxide, said molybdenum being essentially molybdenum monoxide. The invention further relates to a PVD process for producing the disclosed coating, in which the layer comprising the molybdenum monoxide is produced using arc evaporation. The invention also relates to a component that has said coating.
DIELECTRIC HAVING HIGH-DIELECTRIC CONSTANT, METHOD OF MANUFACTURING THE SAME, TARGET MATERIAL FOR MANUFACTURING THE DIELECTRIC, ELECTRONIC DEVICE INCLUDING THE DIELECTRIC, AND ELECTRONIC APPARATUS INCLUDING THE ELECTRONIC DEVICE
Disclosed are a high-dielectric and method of manufacturing the same, a target material used for manufacturing the high-dielectric, an electronic device including the high-dielectric, and an electronic apparatus including the electronic device. The high-dielectric includes a first material including oxygen and at least two components, and a second material different from the first materials. The first material is a dielectric having a dielectric constant greater than a dielectric constant of silicon oxide, and the second material is an element for reducing a crystallization temperature of the first material. The content of the second material with respect to the first material may be within a range that does not deteriorate leakage current characteristics of the first material. The content of the second material may be in a range of about 0.1 atomic % to about 10 atomic %, about 0.1 atomic % to about 8.5 atomic %, or about 0.1 atomic % to about 2 atomic %.
FERROELECTRIC ELEMENT AND METHOD OF MANUFACTURING FERROELECTRIC ELEMENT
A method of manufacturing a ferroelectric element includes forming an insulating film on one side of a metal substrate by an electron beam (EB) vapor deposition method or a sputtering method; forming a metal film on the insulating film by the sputtering method; and forming a ferroelectric film on the metal film by a sol-gel method. The metal substrate includes iron (Fe) and nickel (Ni), and a content of the nickel (Ni) is greater than or equal to 30% and less than or equal to 40%.
COMPONENT OF A MOLYBDENUM ALLOY AND METHOD FOR FORMING AN OXIDATION PROTECTION LAYER THEREFOR
Disclosed is a method for improving the high-temperature stability of a component, in particular a blade of a turbomachine, formed at least partially from a molybdenum alloy that, besides molybdenum, silicon, boron and titanium, comprises iron and/or yttrium. The method comprises depositing a diffusion barrier layer formed from technically pure molybdenum or tungsten or being an alloy based on molybdenum and/or tungsten at least on an outer surface, which comprises the molybdenum alloy, of the component, and depositing silicon on the diffusion barrier layer to form molybdenum silicides and/or tungsten silicides.
INSULATION LAYER ON STEEL PISTONS WITHOUT GALLERY
A galleryless steel piston designed to improve thermal efficiency, fuel consumption, and performance of an engine is provided. The piston includes a steel body portion and a thermal barrier layer applied to an upper combustion surface and/or a ring belt to reduce the amount of heat transferred from a combustion chamber to the body portion. The thermal barrier layer has a thermal conductivity which is lower than a thermal conductivity of the steel body portion. The thermal barrier layer typically includes a ceramic material, for example ceria, ceria stabilized zirconia, and/or a mixture of ceria stabilized zirconia and yttria stabilized zirconia in an amount of 90 to 100 wt. %, based on the total weight of the ceramic material. The thermal barrier layer can also have a gradient structure which gradually transitions from 100 wt. % of a metal bond material to 100 wt. % of the ceramic material.
TA-C BASED COATINGS WITH IMPROVED HARDNESS
A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.