A method for controlling a combustion apparatus having a combustion state in which a parameter related to the combustion state reflects a chaotic behavior is provided. The method includes the steps of measuring the parameter and determining a time series of the parameter, shifting the time series by a variable time delay for determining a time-shifted signal, and forming a difference between the time-shifted signal and the time series for determining a time dependent first signal, so that a norm of the difference is lowest. A time dependent second signal is determined, wherein determining the time dependent second signal includes at least one of using a frequency of a desired oscillating combustion state, and shifting the time series by a set time delay. The first signal and the second signal are combined to determine a control signal. The control signal is used to influence the combustion apparatus.

A device for computing correction for control parameter in a manufacturing process executed on a manufacturing apparatus includes circuitry which acquires an index representing fluctuation in a manufacturing apparatus, acquires an apparatus model and a process model, acquires an output from a sensor in the manufacturing apparatus, transforms the output into first fluctuation for a process element, transforms the index into second fluctuation for the process element based on the apparatus model, computes fluctuation for performance indicator from the first and second fluctuation based on the process model, computes correction for the performance indicator from control range for the performance indicator and the fluctuation for the performance indicator, and converts the correction for the performance indicator into correction for each process element based on the process model such that correction for control parameter in process executed on the manufacturing apparatus is computed from the correction converted for each process element.

A method for controlling a combustion apparatus having a combustion state in which a parameter related to the combustion state reflects a chaotic behavior is provided. The method includes the steps of measuring the parameter and determining a time series of the parameter, shifting the time series by a variable time delay for determining a time-shifted signal, and forming a difference between the time-shifted signal and the time series for determining a time dependent first signal, so that a norm of the difference is lowest. A time dependent second signal is determined, wherein determining the time dependent second signal includes at least one of using a frequency of a desired oscillating combustion state, and shifting the time series by a set time delay. The first signal and the second signal are combined to determine a control signal. The control signal is used to influence the combustion apparatus.