Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots’ movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.

Osmotic energy transfer systems utilize cyclic electro-chemical stimuli to induce an osmotic gradient and corresponding fluid flows across a semi-permeable membrane. The fluid transfers and osmotic flows are converted into mechanical displacements. By cycling or pulsing the electro-chemical stimuli, fluid transfers across the semi-permeable membrane repeatedly alternatingly change direction over time and correspondingly realizing a cycle of reciprocating mechanical displacements.

Osmotic energy transfer systems utilize cyclic electro-chemical stimuli to induce an osmotic gradient and corresponding fluid flows across a semi-permeable membrane. The fluid transfers and osmotic flows are converted into mechanical displacements. By cycling or pulsing the electro-chemical stimuli, fluid transfers across the semi-permeable membrane repeatedly alternatingly change direction over time and correspondingly realizing a cycle of reciprocating mechanical displacements.

Osmotic energy transfer systems utilize cyclic electro-chemical stimuli to induce an osmotic gradient and corresponding fluid flows across a semi-permeable membrane. The fluid transfers and osmotic flows are converted into mechanical displacements. By cycling or pulsing the electro-chemical stimuli, fluid transfers across the semi-permeable membrane repeatedly alternatingly change direction over time and correspondingly realizing a cycle of reciprocating mechanical displacements.

The present disclosure is intended to prevent blockage of a path that allows a fluid to flow to a predetermined position where a pressure of the fluid is applied to a cell unit. An electrochemical compressor according to an embodiment includes first and second members, an elastic body, a fluid chamber, and a fluid path. The elastic body exerts an elastic force in a direction in which the first member and the second member are pushed apart from each other, and thereby presses a stack of electrochemical cells. The fluid chamber has the elastic body disposed therein and receives boosted gas flowing thereinto, the fluid chamber allowing the boosted gas to apply a pressure to push the first member and the second member apart from each other. The fluid path connects the fluid chamber to a flow path into which the boosted gas is discharged from the electrochemical cells.

The present disclosure is intended to provide an electrochemical compressor capable of preventing a liquid, such as water, from accumulating inside a piston. An electrochemical compressor according to an embodiment includes a housing chamber and a drain path. The housing chamber houses an elastic body that presses an electrochemical cell with its elastic force, and is configured to receive part of a gas compressed by the electrochemical cell, the part of the gas flowing into the housing chamber. In the electrochemical cell, the gas is supplied to an anode side of a solid polymer electrolyte membrane as a partition wall, and is compressed by being moved by electricity to a cathode side opposite to the anode side. The drain path allows a liquid in the housing chamber to be drained out of the housing chamber.

Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots' movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.