A cryopump includes a cryopanel disposed in a cryopump housing and including a non-combustible adsorbent, a heater heating the non-combustible adsorbent and the cryopanel, a purge valve connecting the cryopump housing to a purge gas source, a rough valve connecting the cryopump housing to a rough pump, a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing, and a controller that controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either a sublimation regeneration sequence for sublimating water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere or a dehydration sequence for dehydrating the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere at room temperature or a temperature higher than the room temperature.

A cryopump comprising: a vessel comprising a frontal open area, the frontal open area comprising an inlet to the vessel; a radiation shield; a two stage refrigerator extending into the vessel, a first stage of the refrigerator being thermally coupled to the radiation shield. A first stage array is arranged within the vessel and is also thermally coupled to the first stage of the refrigerator. A cryopanel structure is coupled to a second stage of the refrigerator. The first stage array comprises a plurality of elements arranged at increasing distances from the inlet, the element closest to the inlet being between the cryopanel structure and the inlet and elements further from the inlet having a passage through a central portion. The element closest to the inlet has a smaller outer perimeter than the elements further from the inlet.

A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes axially arranged cryopanels including a top cryopanel disposed closest to the cryopump intake port, and a top cryopanel accommodation cryopanel which is thermally coupled to the high-temperature cooling stage and is disposed in the cryopump intake port to form a top cryopanel accommodation compartment.

A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, and a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes a plurality of cryopanels and a plurality of heat transfer bodies axially arranged in columnar shape, and in which the plurality of cryopanels and the plurality of heat transfer bodies are axially stacked.

A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.

The disclosure relates to a device for improving a vacuum in the housing of a machine, in particular a centrifugal-mass energy store, comprising a rotor, for example a shaft having a centrifugal mass arranged thereon, which rotor is supported on at least one superconducting bearing in a contactless manner and is arranged in a vacuum container. In order to maintain the operating state of the superconducting bearing, the superconducting bearing is thermally connected to a cold source cooled by a cryogenic medium. According to the invention, the vacuum in the vacuum container is improved by means of an adsorber thermally connected to a cooling apparatus. The cooling of the adsorber occurs preferably by means of evaporated cooling medium from the superconducting bearing.

An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing.

A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange.

A cryopump includes a cryocooler which includes a first cooling stage, a second cooling stage having a tip stage surface, and a cryocooler structure portion which extends in an axial direction from the first cooling stage to the second cooling stage, a radiation shield which is thermally coupled to the first cooling stage and includes a shield front end which defines a shield main opening and a shield bottom portion having a cryocooler insertion hole which receives the cryocooler structure portion such that the tip stage surface faces the shield main opening, a cap member which surrounds the tip stage surface in a non-contact manner and is thermally coupled to the first cooling stage, and a second stage cryopanel which is disposed between the cap member and the first cooling stage in the axial direction and is thermally coupled to the second cooling stage.

A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuumvessel, based on a vacuummeasurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.