A pump is provided with a pump housing, a vibrating portion, a driving portion, and a displacement regulating portion. The pump housing internally has a pump chamber. The vibrating portion is supported against the pump housing in the pump chamber and divides the pump chamber into a first pump chamber and a second pump chamber. The driving portion drives the vibrating portion so as to bend and vibrate the vibrating portion in a predetermined direction. The displacement regulating portion is positioned to prevent displacement of the vibrating portion that results in plastic deformation.

A manufacturing method of micro fluid actuator includes: providing a substrate; depositing a first protection layer on a first surface of the substrate; depositing an actuation region on the first protection layer; applying lithography dry etching to a portion of the first protection layer to produce at least one first protection layer flow channel; applying wet etching to a portion of a main structure of the substrate to produce a chamber body and a first polycrystalline silicon flow channel region, while a region of an oxidation layer middle section of the main structure is not etched; applying reactive-ion etching to a portion of a second surface of the substrate to produce at least one substrate silicon flow channel; and applying dry etching to a portion of a silicon dioxide layer to produce at least one silicon dioxide flow channel.

A piezoelectric cooling system and method for driving the cooling system are described. The piezoelectric cooling system includes a first piezoelectric cooling element and a second piezoelectric cooling element. The first piezoelectric cooling element is configured to direct a fluid toward a surface of a heat-generating structure. The second piezoelectric cooling element is configured to direct the fluid to an outlet area after heat has been transferred to the fluid by the heat-generating structure.

A microfabricated fluid pump is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied. The force may be provided by an embedded layer of piezoelectric material. Embedded strain gauges may allow self-sensing and convenient, precise operational control.

A fluid actuator includes an actuating portion, a piezoelectric unit, a conduction unit, and a levelness regulating portion. The actuating portion includes a first actuating area, a second actuating area, and at least one connecting section between the two actuating areas. The piezoelectric unit includes a first signal area and a second signal area. The two signal areas are provided in the same plane and are isolated from each other by an isolating portion. The piezoelectric unit corresponds in position to the first actuating area of the actuating portion. The conduction unit includes a first electrode and a second electrode. The first signal area of the piezoelectric unit is electrically connected to the first electrode, and the second signal area of the piezoelectric unit to the second electrode. The levelness regulating portion, the piezoelectric unit, and the conduction unit are located on the same side of the actuating portion.

A method for removing bodily fluid includes drawing bodily fluid that has accumulated in excess, converting the drawn fluid from bulk liquid form to aerosol form, and disposing of the aerosol via evaporation of liquid droplets and absorption and/or diffusion of vapor. Conversion from bulk liquid to aerosol may include collecting the bulk liquid fluid in a reservoir, conveying the bulk liquid bodily fluid to an atomizer, converting the bulk liquid fluid into an aerosol having ultrafine droplets, and ejecting the aerosol into a subcutaneous space for disposal via evaporation of liquid droplets and absorption and/or diffusion of vapors. The method may be performed with a subcutaneous atomizer that may be controlled locally or by an external transmitter for effecting a conversion and mist rate to keep pace with the accumulation of excess bodily fluid.

A method is disclosed of fabricating a MEMS device that includes one or more wafers configured as pump or valve. The pump or valve includes an inlet port to receive fluid and an outlet port to release the fluid within the pump or valve. The method comprises growing silicon dioxide on a silicon layer of the one or more wafers to form a silicon dioxide layer on the silicon layer, depositing silicon nitride on the silicon dioxide layer of the one or more wafers to form a silicon nitride layer on the silicon dioxide layer, spinning a front side to create a pattern thereon defining an area for the pump or valve, dry etching the one or more wafers at the area for the pump or valve to remove the silicon dioxide and silicon nitride layers to define an opening for the pump or valve.

A first power supply member and a second power supply member are arranged on the same side of a first member in a thickness direction of an actuator. The first power supply member includes a first external connection terminal. The second power supply member includes a second external connection terminal. The first external connection terminal and the second external connection terminal are arranged on the same positions in the thickness direction. A second insulating layer is arranged between the second power supply member and a frame body. A far end side portion on an opposite side to a side, on which the first external connection terminal protrudes, in the first power supply member is bent toward the frame body to be electrically connected with the frame body.

A pump includes a housing, a piezoelectric device, a plurality of first holes, a plurality of second holes, and a plurality of first valves. The housing has a pump chamber defined by a first major plate, a second major plate, and a peripheral plate. The piezoelectric device is provided on the first major plate. The plurality of first holes each extend through the first major plate and are arranged annularly. The plurality of second holes each extend through the second major plate. The plurality of first valves are provided at the plurality of first holes, respectively. When the piezoelectric device is activated, the first major plate undergoes bending vibration with a node defined between a center and a peripheral edge of the first major plate. The plurality of first holes are provided between the node and the peripheral edge.

A security tag can prohibit unauthorized usage of a device or product. The device may include an electronic nicotine delivery systems (“ENDS”) device, which may include aerosol delivery devices such as smoking articles that produce aerosol. The security tag can prevent usage until authorized. Attempts at usage without authorization can result in the device being unusable. The authorization may include identity confirmation or age verification.