A device for detecting a content of critical gas in a mining chamber of a tunnel boring machine includes a separation module by which a fluid fed in via an extraction line connection is cleaned of solid and liquid components. A gas line arrangement arranged downstream of the separation module in the flow direction of the fluid carries the fluid, including substantially only gaseous components, through a pressure reducer and through a flow control valve of a metering module by which the gas to be analyzed can be delivered in a controlled manner assisted by a double diaphragm pump and a pressure stabilizer to a gas analysis unit even at high pressures in the cavity.

Disclosed is a valve-less micro pump configuration that includes plural micro pump elements, each including a pump body having a compartmentalized pump chamber, with plural unobstructed inlet ports and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body.

A piezoelectric pump includes a first top plate, a second top plate, a diaphragm, a first side wall, and a second side wall. The diaphragm has a vibrating part to which a piezoelectric element is attached, a frame part, and a connecting part. The connecting part has formed therein a third opening which lets a first pump chamber and a second pump chamber communicate. The frame part has formed therein a fourth opening which communicates with the third opening and also communicates with outside. The piezoelectric pump further includes: in the first pump chamber, an annular first valve provided as spaced from a first opening in a planar view so as to surround the first opening; and in the second pump chamber, an annular second valve provided as spaced from a second opening in the planar view so as to surround the second opening.

A piezoelectric pump includes a first top board, a second top board, a diaphragm, a first side wall, a second side wall, a first valve, and a second valve. The first valve has an annular shape to surround the first aperture while being spaced apart from the first aperture and the second aperture, and is disposed in the first pump chamber between the first aperture and the second aperture when viewed in a plan. The second valve has an annular shape to surround the third aperture while being spaced apart from the third aperture and the fourth aperture, and is disposed in the second pump chamber between the third aperture and the fourth aperture when viewed in a plan.

Disclosed is a valve-less micro pump configuration that includes plural micro pump elements, each including a pump body having a compartmentalized pump chamber, with plural unobstructed inlet ports and outlet ports and a plurality of membranes disposed in the pump chamber to provide compartments. The membranes are anchored between opposing walls of the pump body and carry electrodes disposed on opposing surfaces of the membranes and walls of the pump body.

An electromagnetic cooling fan includes a thin blade connected to an elongated beam. The beam is simply supported at its two ends with two supporting members. The beam has a magnet attached to it at the center. An electromagnet is used to generate cyclic force on the magnet, causing the beam and the blade to oscillate, generating air flow for cooling purpose.

A piezoelectric pump includes a first top plate, a second top plate, a diaphragm, a first side wall, and a second side wall. The diaphragm has a vibrating part to which a piezoelectric element is attached, a frame part, and a connecting part. The connecting part has formed therein a third opening which lets a first pump chamber and a second pump chamber communicate. The frame part has formed therein a fourth opening which communicates with the third opening and also communicates with outside. The piezoelectric pump further includes: in the first pump chamber, an annular first valve provided as spaced from a first opening in a planar view so as to surround the first opening; and in the second pump chamber, an annular second valve provided as spaced from a second opening in the planar view so as to surround the second opening.

A fluid control device (1) includes a case (21) including a case top plate, a case side plate, and a case bottom plate and having an internal space (59) and a cavity, a pump (11) provided at a position at which the pump (11) divides the internal space (59) into a bottom-plate-side region and a top-plate-side region, the pump (11) being configured to generate a flow of a fluid between the bottom-plate-side region and the top-plate-side region and control the flow direction of the fluid, and a fixing member (31) that fixes the case (21) in place. The case (21) is mounted on the fixing member (31) by using the case top plate or the case bottom plate as a mounting surface (B).

An electromagnetic cooling fan includes a thin blade connected to an elongated beam. The beam is simply supported at its two ends with two supporting members. The beam has a magnet attached to it at the center. An electromagnet is used to generate cyclic force on the magnet, causing the beam and the blade to oscillate, generating air flow for cooling purpose.

A piezoelectric blower includes a first valve, a first housing, a vibrating plate, a piezoelectric element, a second housing, and a second valve. The first housing forms, together with the vibrating plate, a first blower chamber. A first top plate portion includes a first vent hole that allows an inside of the first blower chamber to communicate with an outside of the first blower chamber. The second housing forms, together with an actuator, a second blower chamber. A second top plate portion includes a second vent hole that allows an inside of the second blower chamber to communicate with an outside of the second blower chamber. The vibrating plate includes an opening portion and a third vent hole, the opening portion allowing an outer periphery of the first blower chamber and an outer periphery of the second blower chamber to communicate with each other.