The present invention relates to a redundant vacuum pumping system (300) and a pumping method using this system, comprising a primary roots pump (302), a first pumping sub-system (310) and a second pumping sub-system (320), wherein the first pumping sub-system (310) and the second pumping sub-system (320) are arranged to pump in parallel the gas evacuated by the primary roots pump (302), the first pumping sub-system (310) comprising a first secondary roots pump (311) and a first positive displacement pump (312) and a first valve (313) positioned between the gas discharge outlet (302b) of the primary roots pump (302) and the gas suction inlet (311a) of the first secondary roots pump (311), and the second pumping sub-system (320) comprising a second secondary roots pump (311) and a second positive displacement pump (312) and a second valve (323) positioned between the gas discharge outlet (302b) of the primary roots pump (302) and the gas suction inlet (321a) of the second secondary roots pump (321). According to the invention, the first pumping sub-system (310) and the second pumping sub-system (320) are configured to pump at a same flow rate, and the primary roots pump (302) is configured to be able to pump at a flow rate F equal to the pumping flow rate of the primary pumping sub-system (310) plus the pumping flow rate of the secondary pumping sub-system (320).

The present invention provides a method for cleaning a component for use in an ultra-high vacuum. The method may comprise the steps of placing the component to be cleaned in a vacuum furnace chamber; plasma cleaning the component at a temperature of greater than about 80° C.; and evacuating the chamber to a pressure of less than about 10E-5 mbar. Apparatus for performing such methods and kits comprising said components are also provided.

A leak detector is provided for leak-testing objects that are to be tested by spraying tracer gas, the leak detector including: a detection inlet configured to be connected to an object that is to be tested; a pumping device including a vacuum line connected to the detection inlet, a rough-vacuum pump connected to the vacuum line, and a turbomolecular vacuum pump connected to the vacuum line, a delivery of which is connected to the rough-vacuum pump; and a gas detector connected to the turbomolecular vacuum pump, the pumping device further including an ancillary pump connected to the rough-vacuum pump and being configured to lower an ultimate-vacuum pressure of tracer gas in the rough-vacuum pump. A leak detection method for leak-testing objects that are to be tested by spraying tracer gas is also provided.

A pumping system is provided, including a rough-vacuum pump; a Roots vacuum pump including a pumping stage having a stator inside which two Roots rotors are configured to rotate synchronously in opposite directions to drive a gas to be pumped between an inlet orifice and an outlet orifice; and a pipeline connecting the outlet orifice to an intake of the rough-vacuum pump, a shortest distance between an edge of the outlet orifice and each of the Roots rotors in the pumping stage being less than 3 cm, and the outlet orifice being situated at the end of an upstream tube of the pipeline that passes into the pumping stage.

A fluid delivery device has a primary pump and a main pump fluidically connected to the primary pump. The primary pump can be driven by a primary pump input shaft, the main pump can be driven by a main pump input shaft, and the primary pump input shaft and the main pump input shaft are mechanically coupled to a common drive shaft of the fluid delivery device. The primary pump is in the form of a non-compensated gear pump or a centrifugal pump and the main pump is in the form of a compensated internal gear pump.

Combining at least one centrifugal compression stage and at least one positive displacement compression stage in an integrally geared compressor to allow for different types of compression based on a temperature or a volume of gas to be compressed by the integrally geared compressor.

A turbocharger generating a vacuum negative pressure may include a compressor which receives, through a turbocharger shaft, a rotational force of a turbine which rotates based on exhaust gas from an engine and turbo-charges an intake which is supplied to the engine, and a motorless vacuum pump coupled to the turbine through a center housing which is coupled to the compressor and is configured to be rotated by the turbocharger shaft, thus generating a vacuum negative pressure.

The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a dry screw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

A compressor including a gear system configured to be driven by a drive unit, a plurality of compression stages coupled to the gear system, wherein the plurality of compression stages includes at least one centrifugal compression stage and at least one positive displacement compression stage, is provided. Furthermore, an associated method is also provided.

The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a claw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).