Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller. The controller is configured to determine a control signal based at least in part on pressure measurements of the plurality of pressure sensors and a position measurement of the at least one position sensor, and apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.

A valve actuator control system, and a related manifold. The control system includes a pneumatic directional valve operable to move the actuator. The manifold has multiple internal channels and is mountable to the pneumatic directional valve in alternative connections so that one internal channel of the manifold is active and the others are non-active, so that the manifold and pneumatic directional valve can provide operability of the actuator in a plurality of different fail modes.

A compressed gas motor. The motor has a port and a hollow cylinder delimited by a wall with a ventilation opening, a rear closure, and a plunger axially movable in the cylinder. The plunger divides the cylinder into front and back chambers. The ventilation opening is periodically opened towards the back chamber during operation of the motor by movement of the plunger. A compression spring in the front chamber urges the plunger towards the rear closure and/or a tension spring in the back chamber draws the plunger towards the rear closure so that the back chamber is closed relative to the ventilation opening by the plunger and the back chamber is connected with the port when the same pressure prevails in the front and back chambers. The motor can be used in surgical drive systems, medical lavage systems and medical devices. Also disclosed is a method for operating the motor.

A compressed gas motor. The motor has a port and a hollow cylinder delimited by a wall with a ventilation opening, a rear closure, and a plunger axially movable in the cylinder. The plunger divides the cylinder into front and back chambers. The ventilation opening is periodically opened towards the back chamber during operation of the motor by movement of the plunger. A compression spring in the front chamber urges the plunger towards the rear closure and/or a tension spring in the back chamber draws the plunger towards the rear closure so that the back chamber is closed relative to the ventilation opening by the plunger and the back chamber is connected with the port when the same pressure prevails in the front and back chambers. The motor can be used in surgical drive systems, medical lavage systems and medical devices. Also disclosed is a method for operating the motor.

Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.

Disclosed are Variable Displacement Power Controllers and applications generally in the field of fluid powered systems that provide for increased efficiency and effectiveness over known fluid systems, where fluid power generally refers to hydraulic or pneumatic power systems.

Disclosed are Variable Displacement Power Controllers and applications generally in the field of fluid powered systems that provide for increased efficiency and effectiveness over known fluid systems, where fluid power generally refers to hydraulic or pneumatic power systems.

Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller. The controller is configured to determine a control signal based at least in part on pressure measurements of the plurality of pressure sensors and a position measurement of the at least one position sensor, and apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.

Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.

A compressed gas motor. The motor has a port and a hollow cylinder delimited by a wall with a ventilation opening, a rear closure, and a plunger axially movable in the cylinder. The plunger divides the cylinder into front and back chambers. The ventilation opening is periodically opened towards the back chamber during operation of the motor by movement of the plunger. A compression spring in the front chamber urges the plunger towards the rear closure and/or a tension spring in the back chamber draws the plunger towards the rear closure so that the back chamber is closed relative to the ventilation opening by the plunger and the back chamber is connected with the port when the same pressure prevails in the front and back chambers. The motor can be used in surgical drive systems, medical lavage systems and medical devices. Also disclosed is a method for operating the motor.