A magnetic bearing device and a positioning system which includes the magnetic bearing device are provided. The magnetic bearing device comprises a stator and a moving member which are formed from a coil device with at least one coil body, magnets, and/or flux guide members, where the moving member is movable relative to the stator along a direction of motion and the stator and the moving member are configured such that a magnetic force can be exerted upon the moving member when electrical energy is applied to the coil device to form an air gap between the stator and the moving member. The coil device is arranged exclusively in the stator and the extension of the moving member in the direction of motion is smaller than the extension of the stator in this direction. The extension of the stator corresponds to the length of the at least one coil body.

An active aerostatic bearing comprises a first plate and a force actuator. The first plate has a central recess area including an orifice forming an inlet restrictor for pressurized air from a central nozzle. The pressurized air forms an air gap between a guiding surface and the first plate. The force actuator is configured to act to deform the first plate so as to change a shape of the air gap, wherein the actuator is configured to cause a conical deformation of the first plate.

A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.

An aerostatic bearing includes a slider that is guidable on a guide surface. The slider has an inner, conical sliding surface of an inner air bearing facing the guide surface with a central compressed air supply. The conical sliding surface is attached by first joints to the central compressed air supply and by second joints to a base of the slider arranged on a side of the slider facing away from the guide surface, such that a cone angle of the conical sliding surface is variable. The conical sliding surface is surrounded by an annular sliding surface of an outer air bearing having an annular compressed air supply.

A rotation mechanism includes: a housing; a shaft inserted through a hole provided at the housing; bearings installed at the housing and rotatably supporting the shaft; a rotary member provided at one end portion of the shaft, adapted to be rotated together with the shaft, and having a portion that projects to a radially outer side of the hole and faces the housing with a gap having a predetermined size; and a gas passage adapted to connect the gap to outside of the housing and allow gas contained in a portion of the gap to pass to the outside of the housing.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

An active aerostatic bearing comprises a first plate and a force actuator. The first plate has a central recess area including an orifice forming an inlet restrictor for pressurized air from a central nozzle. The pressurized air forms an air gap between a guiding surface and the first plate. The force actuator is configured to act to deform the first plate so as to change a shape of the air gap, wherein the actuator is configured to cause a conical deformation of the first plate.

A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.

An aerostatic bearing includes a slider that is guidable on a guide surface. The slider has an inner, conical sliding surface of an inner air bearing facing the guide surface with a central compressed air supply. The conical sliding surface is attached by first joints to the central compressed air supply and by second joints to a base of the slider arranged on a side of the slider facing away from the guide surface, such that a cone angle of the conical sliding surface is variable. The conical sliding surface is surrounded by an annular sliding surface of an outer air bearing having an annular compressed air supply.

Systems and methods are disclosed for rotationally coupling housing portions of an information handling system. An information handling system may include a housing having a first housing portion and a second housing portion. The information handling system may also include a hinge assembly coupling the first housing portion and the second housing portion, the hinge assembly including a first hinge, a second hinge, and a deformable foam, the first hinge, the second hinge, and the deformable foam may allow the hinge assembly to bend when the first housing portion is rotated in relation to the second housing portion. In addition, the information handling system may include a flexible display coupled to the first housing portion and the second housing portion, the flexible display to be placed over the first housing portion, the second housing portion, and the hinge assembly and configured to bend when the hinge assembly bends.