An apparatus for conveying a substrate includes a base along which the substrate is conveyed, a first upward gas ejecting section, a second upward gas ejecting section and a third upward gas ejecting section disposed over the base, the third upward gas ejecting section being disposed between the first and second upward gas ejecting sections, and a first downward gas ejecting section and a second downward gas ejecting section disposed above and facing respective portions of the third upward gas ejecting section. Gas ejected upward from the first, second and third upward gas ejecting sections floats the substrate. The substrate is subjected to pressure by gas ejected downward from the first and second downward gas ejecting sections. The first and second downward gas ejecting sections are spaced to provide a working area therebetween and through which the substrate is irradiated with a laser beam.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

An apparatus for conveying a substrate includes a base along which the substrate is conveyed, a first upward gas ejecting section, a second upward gas ejecting section and a third upward gas ejecting section disposed over the base, the third upward gas ejecting section being disposed between the first and second upward gas ejecting sections, and a first downward gas ejecting section and a second downward gas ejecting section disposed above and facing respective portions of the third upward gas ejecting section. Gas ejected upward from the first, second and third upward gas ejecting sections floats the substrate. The substrate is subjected to pressure by gas ejected downward from the first and second downward gas ejecting sections. The first and second downward gas ejecting sections are spaced to provide a working area therebetween and through which the substrate is irradiated with a laser beam.

The present invention relates to a device for holding, positioning and/or moving an object, with a base and with a carrier movable relative to the base, at least one magnetic bearing for generating a bearing or holding force between the base and the carrier, wherein the carrier is contactlessly supported on the base via the magnetic bearing, at least one drive acting contactlessly between base and carrier for the displacement of the carrier along the base in at least one transport direction, wherein the drive comprises a linear motor with at least one slider and one stator, which are arranged on the base and on the carrier and which, aside from a displacement force acting along the transport direction, are configured to create a counter-force between base and carrier which counteracts the bearing or holding force.

A gas floated workpiece supporting apparatus includes a gas upward ejector ejecting gas upward, and a gas downward ejector located at an upper side from the gas upward ejector and ejecting gas downward. The gas downward ejector is installed at a position where the gas downward ejector ejects the gas downward from above a plate-shaped workpiece to apply pressure to the plate-shaped workpiece that is floated and supported by the gas ejected from the gas upward ejector, whereby a uniform floating amount supports the plate-shaped workpiece with high flatness at a time of floating and supporting the plate-shaped workpiece.

Systems and methods are disclosed for rotationally coupling housing portions of an information handling system. An information handling system may include a housing having a first housing portion and a second housing portion. The information handling system may also include a hinge assembly coupling the first housing portion and the second housing portion, the hinge assembly including a first hinge, a second hinge, and a deformable foam, the first hinge, the second hinge, and the deformable foam may allow the hinge assembly to bend when the first housing portion is rotated in relation to the second housing portion. In addition, the information handling system may include a flexible display coupled to the first housing portion and the second housing portion, the flexible display to be placed over the first housing portion, the second housing portion, and the hinge assembly and configured to bend when the hinge assembly bends.

Systems and methods are disclosed for rotationally coupling housing portions of an information handling system. An information handling system may include a housing having a first housing portion and a second housing portion. The information handling system may also include a hinge assembly coupling the first housing portion and the second housing portion, the hinge assembly including a first hinge, a second hinge, and a deformable foam, the first hinge, the second hinge, and the deformable foam may allow the hinge assembly to bend when the first housing portion is rotated in relation to the second housing portion. In addition, the information handling system may include a flexible display coupled to the first housing portion and the second housing portion, the flexible display to be placed over the first housing portion, the second housing portion, and the hinge assembly and configured to bend when the hinge assembly bends.

A gas floated workpiece supporting apparatus includes a gas upward ejector ejecting gas upward, and a gas downward ejector located at an upper side from the gas upward ejector and ejecting gas downward. The gas downward ejector is installed at a position where the gas downward ejector ejects the gas downward from above a plate-shaped workpiece to apply pressure to the plate-shaped workpiece that is floated and supported by the gas ejected from the gas upward ejector, whereby a uniform floating amount supports the plate-shaped workpiece with high flatness at a time of floating and supporting the plate-shaped workpiece.

A rotation mechanism includes: a housing; a shaft inserted through a hole provided at the housing; bearings installed at the housing and rotatably supporting the shaft; a rotary member provided at one end portion of the shaft, adapted to be rotated together with the shaft, and having a portion that projects to a radially outer side of the hole and faces the housing with a gap having a predetermined size; and a gas passage adapted to connect the gap to outside of the housing and allow gas contained in a portion of the gap to pass to the outside of the housing.