Provided for the purposes of further improved precision of a high-precision machine tool (100) are at least one linear drive- and guide-bearing (1) having at least one linear motor (27), which has at least one magnet (15) arranged on one of the machine components (5) and at least one coil (25) arranged on the other machine component (10) and operatively connected to the at least one magnet (15), wherein the at least one magnet (15) and the at least one coil (25) are configured to exert an opposing attractive force and to perform an at least temporarily relative movement in relation to one another; at least one hydrostatic fluid bearing (30-1, 30-3) arranged on one of the two machine components (10) and operatively connected to the other machine component (5), wherein the hydrostatic fluid bearing (30-1, 30-3) exerts a repulsive force opposite to the attractive force; and a first bearing gap (H1), formed between the two machine components (5, 10), the height of which is greater than 0 μm and less than or equal to 10 μm.

A magnetic levitation device as a toy or a bearing is provided. The magnetic levitation device has an inner component and an outer component. Multiple magnet rings are mounted on the inner component and multiple magnet rings are mounted on the outer component. The magnet rings on the inner component attract the magnet rings on the outer component. Multiple pulley assemblies are mounted on the outer component. An elastic component is connected with a center pulley. The two ropes are wrapped on the center pulley. One end of each one of the ropes is mounted on one of the fixing points that is connected to one of the magnet rings mounted on the outer component and another one end of the rope is mounted on a reactive pulley. With such structure, the outer component may levitate from the inner component and the pulley assemblies can balance the entire device.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

A solenoid includes a coil configured to generate magnetic force when a current flows therethrough; a stator core provided inside the coil, the stator core being configured to be excited by the magnetic force of the coil; a plunger received in a plunger chamber formed inside the stator core, the plunger being configured to move toward an attraction part in the plunger chamber by the magnetic force of the coil; a shaft provided to be able to move, together with the plunger, along axial direction; and a filter provided inside the stator core. The filter is provided on a side of the attraction part from the plunger and in an axial range where the coil is provided.

A vehicle for travelling along a linear route guideway, comprising a body configured to accommodate cargo, equipment or passenger(s); traction engines on the body of the vehicle configured to orient the body within relative to the linear route guideway; and a controller for actuating at least one of the traction engines as a function of a desired orientation of the vehicle relative to the linear route guideway. A controller system for a vehicle for travelling along a linear route guideway is also disclosed.

Non-contact bearing system, such as a magnetic levitation system, having a geometry. The geometry includes a plurality of track elements arranged to nest together in a length direction. The plurality of track elements are shaped to define at least an upper and a lower null flux crossing and the plurality of nested track elements form a conductive metamaterial. Method for constructing a metamaterial null flux magnetic levitation track with tessellating elements of stamped conductors.

Provided is a contactless vertical transfer device using a linear motor. The contactless vertical transfer device using a linear motor includes: a transfer unit for picking up an article; and a linear motor located on a side portion of the transfer unit to move the transfer unit, wherein the linear motor comprises at least one driving unit that is located on a side portion of the transfer unit and provided with a mover which a coil is wound; and a rail unit that is located apart from the mover by a predetermined distance in a lateral direction and provided with a plurality of magnet portions disposed in a transfer direction of the transfer unit. The transfer unit is moved along the rail unit by a thrust force of the mover and the magnet portion.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

The invention relates to a linear guideway assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path (x), said linear guideway assembly comprising: one, single rigid body formed as a linear guideway defining said linear displacement path as well as at least one rigid body formed as a product carrier being displaceable along said single linear guideway, wherein the linear guideway assembly further comprises multiple magnetic bearing assemblies for allowing contactless linear displacement of the at least one product carrier relative to the single, linear guideway, wherein all magnetic bearing assemblies are mounted to the product carrier in such way that the magnetic bearing assemblies are arranged in constraining five degrees of freedom (y, z, θ, Φ and ψ) of the product carrier relative to the single, linear guideway, whilst allowing one, translational degree of freedom (x) of the product carrier along the single, linear guideway, wherein all magnetic bearing assemblies, seen in the translational direction (x) of the linear displacement path, are mounted at the side of the product carrier closest to the single, linear guideway.