A gas dispensing system includes a frame configured to house multiple rows of gas cylinders, a common gas manifold fluidically coupled to a gas outlet for dispensing of gas from the gas cylinders, a gas manifold for each row of gas cylinders configured to be fluidically coupled to each cylinder in the row by a respective dispensing valve, a vent manifold for each row of gas cylinders, in which the vent manifold for a given row of gas cylinders is configured to be fluidically coupled to each cylinder in the row via a respective vent valve, in which each vent valve is configured to open when a temperature on the vent valve exceeds a threshold temperature, and a common vent manifold, in which each vent manifold is fluidically coupled to the common vent manifold.

An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

An integrated multiple valve manifold that is reduced in size and weight by integrally incorporating a plurality of valve mechanisms in one manifold. The one manifold, which is formed of an extruded material through which a fluid supply hole and fluid discharge holes extend, includes a plurality of valve holes each of which communicates with the fluid supply hole and the fluid discharge holes by directly intersecting both of the fluid supply hole and the fluid discharge holes, output ports that are formed so as to individually communicate with the valve holes, spools that are slidably inserted into the valve holes, and electromagnetic pilot valves that are individually attached to one ends or both ends of the valve holes.

A system includes a valve, handle, guide, arm, channel, and projection. The handle is proximate the valve and is configured to open and close the valve. The handle is in a first position when the valve is open and in a second position when the valve is closed. The guide is connected to the handle. The arm is connected to the guide. The channel is located on one of the guide or the arm, the channel having opposed first and second ends. The projection is located on the other of the guide or the arm, the projection configured to be received in the channel. Moving the projection past a location of the first end of the channel pulls the guide and the handle, thereby moving the handle from the first position to the second position. The projection can be moved toward the second end while the handle remains in the second position.

An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

An object of the invention is to provide a method of controlling a gate valve that operates the gate valve in a short time while suppressing vibration of the valve body. A method of controlling a gate valve provided on an opening of a chamber, wherein the gate valve includes a valve body that opens and closes so as to close the opening of a chamber, a valve seat provided on the edge of the opening to which the valve body is pressed, and a sealing material for sealing between the valve body and the valve seat. The invented method is characterized in that, in moving the valve body to the open position from the closed position where the valve body is pressed against the valve seat with the sealing material compressed, the valve body is made to stop temporarily for a predetermined time at the position immediately before the compressed sealing material is pulled apart or immediately after pulled apart in the opening movement of the valve body.

A system includes a valve, handle, guide, arm, channel, and projection. The handle is proximate the valve and is configured to open and close the valve. The handle is in a first position when the valve is open and in a second position when the valve is closed. The guide is connected to the handle. The arm is connected to the guide. The channel is located on one of the guide or the arm, the channel having opposed first and second ends. The projection is located on the other of the guide or the arm, the projection configured to be received in the channel. Moving the projection past a location of the first end of the channel pulls the guide and the handle, thereby moving the handle from the first position to the second position. The projection can be moved toward the second end while the handle remains in the second position.